Si-based integratable Nano-Opto-Electro-Mechanical Systems

本博士项目旨在研究纳米机电(NEM)谐振器如何通过光机电耦合来响应光，为纳米光电机械系统(NOEMS)这一近年来在纳米技术研究领域备受关注的新型混合系统建立坚实的技术平台。NOEMS的潜在应用领域是高速、超低功耗的可重构器件、光开关、光传感器和光机电信号传感器。考虑到未来在硅技术平台上集成NOEMS的发展，本项目采用了与法国CEA-Leti公司合作，以兼容CMOS的方式制造的SiNEM谐振器。将开发一种新型的测量系统，将工作在射频/微波频率下的NEM谐振器暴露在电信激光中。光学和机电响应的同时观测将为研究纳米硅材料的光机电耦合提供新的思路。一组具有不同尺寸参数的NEM谐振器的系统特性将为未来集成NOEMS提供新的设计指南。

This PhD project is aiming to investigate how the nanoelectromechanical (NEM) resonators respond to light via opto-electro-mechanical coupling to establish solid technological platform of Nano-Opto-Electro-Mechanical Systems (NOEMS), a new class of hybrid systems that is attracting much attention in recent years in the nanotechnology research field. Potential applications of NOEMS are reconfigurable devices, optical switches, optical sensors and opto-electro-mechanical signal transducers at high speed and ultra-low-power consumption. Si NEM resonators fabricated in a CMOS compatible manner in collaboration with CEA-Leti, France are employed in this project considering future development of integrated NOEMS on the silicon technology platform. A novel measurement system where NEM resonators in operation at RF/microwave frequencies are exposed to telecom laser will be developed. Simultaneous observation of optical and electromechanical responses will give great insight on opto-electro-mechanical coupling in nanoscale Si materials. Systematic characterisation of a set of NEM resonators with various dimensional parameters will offer novel design guideline of future integrated NOEMS.