Miniature Phase Grating interferometer contact gauge /high speed phase shifting interferometric gauge

两个项目。1.微型PGI测量仪：基于触针的测量系统已经使用了几十年，采用感应式、光学旋转编码器或干涉运动感测策略。以前的学生Vladimirs Horjkovs成功地模拟和描述了Taylor霍布森现有的PGI技术[1]，并设计和证明了一个成本较低的可扩展版本。该项目的目标是实现一个微型版本，而不损害其关键的高动态范围和内在稳定性。2.大多数设计采用单个和多个激光波长[2，3]或ASE源，其具有由机械运动（压电）、电光[4]或声光方法产生的相移;前一种压电方法目前用在一种仪器中，但它是在~2kHz时测量（采样）速度的限制因素。其目标是开发一种结构，其中采样率超过50 kHz，同时保持纳米级的稳定性和准确性与可行的工作范围1-1000毫米。专利US 5517307 1996 2.专利DE 10 2008 033 942 B3 Proceedings Volume 8884，Optifab 2013 8884V（2013）4. Optics Express 26（3）：3443 2018年2月

Two Projects. 1. Miniaturised PGI gauge: Stylus based measurement systems have been used for decades employing inductive, optical rotary encoder or interferometric motion sensing strategies. A previous student Vladimirs Horjkovs successfully modelled and characterised Taylor Hobson's existing PGI technology [1] as well as deigning and proving out a lower cost scalable version. The objective of this project is to realise a miniature version without compromising its key high dynamic range and intrinsic stability. 2. The use of phase shifting laser interferometry for position measurement is well known however building commercially viable units whilst maintain nm level stability is non-trivial.Most designs employ single and multiple laser wavelengths [2,3] or ASE sources with phase shifting generated by mechanical movement (piezo), Electro-optical [4] or Acousto-optical methods; the former piezo approach is currently used in one family of instruments but is the limiting factor for measurement (sampling) speed at ~2kHz. The objective is to develop an architecture where sampling rates exceed 50kHz whilst maintaining nm level stability and accuracy with practicable working ranges 1-1000 mm. References1. Patent US 5517307 1996 2. Patent DE 10 2008 033 942 B3 3. Proceedings Volume 8884, Optifab 2013 8884V (2013) 4. Optics Express 26(3):3443 February 2018