Cryogenic miniature deformable mirror with position sensing

自适应光学（AO）波前校正技术通过减少大气畸变对成像质量的影响，在改善望远镜使用方面具有巨大的潜力。未来的发展将包括在仪器中使用自适应光学，以使成本有效地访问超大型望远镜（elt）的大焦平面。FP6智能焦平面的一些建议正在开发中，这些建议已经确定了这样的要求，一些针对elt的仪器研究强调需要校正焦平面的小可选部分，而不是试图校正整个焦平面。我们建议开发技术，使微型可变形镜适用于低温仪器的制造，并具有高精度感知可变形镜表面位置的能力。我们将利用微型高频换能器的最新发展，并使用一种新的玻璃键合技术来构建概念验证演示器。位置传感将使我们能够解决滞后效应，而新的粘合技术将使极薄镜面片的使用成为可能。

The technique of wavefront correction using Adaptive Optics (AO) has enormous potential for improving our use of telescopes through reducing atmospheric distortion effects on image quality. Future developments will include the use of adaptive optics within instruments to enable cost effective access to the large focal planes of Extremely Large Telescopes (ELTs). There are proposals under development for FP6 Smart Focal Planes which have identified such a requirement and some instrument studies for ELTs are highlighting the need to correct for small selectable parts of the focal plane rather than attempt to correct the entire focal plane. We propose to develop technology to enable the manufacture of miniature deformable mirrors suitable for use in cryogenic instrumentation, and with the ability to sense the position of the deformable mirror surface to high accuracy. We will make use of recent developments in miniature high frequency transducers and use a novel glass bonding technology to build a proof of concept demonstrator. Position sensing will enable us to address hysteresis effects and the novel bonding technology will enable the use of extremely thin mirror face sheet.