High performance 3D MEMS antenna technology

最近，60 GHz频谱已经发布，用于高数据速率的无线传输应用。为了适应工作频率，需要使用毫米大小的天线。然而，在日常环境中，信号很容易受到衰减，因此提高天线的效率变得至关重要。提高微细加工天线效率的最简单方法是将天线从地面抬起，使极化方向垂直于基板，以使基板损耗最小。为了制造高效的60 GHz天线，将开发用于并行制造三维微结构的自组装机构。所提出的自组装方法允许在不需要组装的情况下制造三维微型机电系统(MEMS)结构。因此，可以以低成本和较少的时间制造出大量的三维MEMS器件。这种制造是在低温下进行的，并与广泛使用的用于开发片上天线的CMOS制造工艺兼容。制造形状变化很大的三维天线的灵活性也使在单一衬底上制造具有不同极化方向图的多个天线成为可能。可以同时使用多个偏振图案来增加给定工作频率的带宽。

Recently, 60GHz spectrum has been released for wireless transmission applications for high data rates. Millimeter size antennas are required in order to accommodate the operation frequency. However, the signal can be attenuated easily in everyday environment and raising the efficiency of antennas becomes essential. Easiest method to improve the efficiency of microfabricated antennas is to raise the antennas from ground plane and move the direction of the polarization vertical to the substrate in order to minimize substrate loss. Self-assembly mechanism for parallel fabrication of three-dimensional microstructures will be developed for fabrication of highly efficient 60GHz antennas. The proposed self-assembly method allows fabrication of three-dimensional micro-electro-mechanical systems (MEMS) structures without the need for an assembly. Thus, a large number of three-dimensional MEMS devices can be fabricated at low cost and in less time. The fabrication is performed under low temperature and is compatible with the widely available CMOS fabrication technology for development of on-chip antennas. The flexibility to create three-dimensional antennas of widely varying shape also enables fabrication of multiple antennas with different polarization patterns on a single substrate. Multiple polarization patterns can be used concurrently to increase the bandwidth for a given operation frequency.