Nonlinear Phenomena in RF Plasmas for Materials Processing Applications

材料加工应用中射频等离子体的非线性现象。这一协调的实验和理论建议侧重于研究适合材料加工应用的射频等离子体放电中的非线性现象。本文将从理论和实验两方面研究时变和稳态非线性等离子体响应对低频电感耦合等离子体电磁场和工作参数的影响。该项目的预期成果将用于优化低频电感耦合等离子体器件的性能和稳定性。

Nonlinear Phenomena in RF Plasmas for Materials Processing Applications. This coordinated and experimental and theoretical proposal focuses on the investigation of the nonlinear phenomena in radio frequency plasma discharges suitable for material processing applications. The effect of time-varying and steady-state nonlinear plasma responses on the electromagnetic fields and the working parameters of the low-frequency inductively coupled plasmas will be investigated theoretically and experimentally. The expected outcome of the project will be used for optimizing the performance and stability of the low frequency inductively coupled plasma devices.