Application of pulsed laser-produced multi-charged ion beams for advanced Ion implantation processes in materials science

Plasmionique Inc.是加拿大领先的等离子体系统开发和制造商，用于 ** 材料合成和先进的表面工程应用。Plasmionique已经确定了一个机会 **，可以利用激光等离子体产生的强多电荷离子束来扩展其产品线，以 ** 满足纳米级表面工程的新兴需求。在这项技术中存在相当大的技术挑战 **，例如增加离子束的电流，同时产生多电荷离子 **，以及聚焦或扩展束，最重要的是，控制能量。该ENGAGE项目旨在评估使用脉冲多电荷离子束的可行性，如强激光与固体靶相互作用产生的脉冲多电荷离子束，测试使用磁场的离子电流密度放大的概念，并试图证明与传统源相比，它在产生更高密度的多电荷离子方面的优越性（见所附文件）。这种方法可以为表面处理工艺提供一种新的途径。然而，在实施之前，必须解决一些基本问题：离子可以实现什么电流？在该技术中可以产生和使用哪些电荷状态？根据需要，它们可以集中或扩展到什么大小？通过使用先进的表征技术，我们将 ** 比较评估不同的多种类离子束的参数，专门用于 ** 在这项技术。我们还想评估磁场的使用是否可以增加粒子束 **，从而降低激光基础设施的成本。拟议的项目利用了位于INRS的独特的ALLS激光基础设施和PI在离子产生、光束处理、激光物质相互作用等几个领域的专业知识，这些知识的结合对这项奋进的成功至关重要。

Plasmionique Inc. is a Canadian leader in the development and manufacturing of plasma-based systems for**materials synthesis and advanced surface engineering applications. Plasmionique has identified an opportunity**to expand its product line using intense multi-charged ion beams as generated by laser-plasma generation, to**address emerging needs for surface engineering on nanoscale. There are considerable technological challenges**in this technology, such as increasing the current of the ion beams, generating simultaneously multi-charged**ions, and focusing down or expanding the beams, and most importantly, controlling the energy.**This ENGAGE project aims to evaluate the feasibility of using pulsed multi-charged ion beams, as produced by**interaction of an intense laser with a solid target, test the concept of ion current density amplification using a**magnetic field, and try to prove its superiority for producing higher density of multi-charged ions, compared to**conventional sources (see attached paper). This methodology could provide a novel route to surface treatment**processes. However, before implementation, some essential questions must be addressed: What current can be**achieved by the ions ? What charge states can be produced and used in the technology ? Up to what sizes can**they be focused down or expanded, as needed ? By using advanced characterization techniques, we will**comparatively assess the parameters of the different multispecies ion beams tailored specifically for being used**in this technique. We also want to evaluate if the use of magnetic fields can allow increasing the particle beam**and as such lowering the cost of the laser-infrastructure.**The proposed project capitalizes on the unique ALLS laser infrastructure located at INRS and on the PI's**established expertise in several fields such as ion-production, beam handling, laser-matter interactions, a**combination of knowledge that is critical to the success of this endeavor.