Excimer laser electrode optimization and solids-based fluorine generation system for operational lifetime extension

该项目旨在与位于安大略省渥太华的二氧化碳和准分子激光技术制造商LightMachines Inc.合作，为准分子激光技术开发一个基于应用的氟储存库。准分子激光需要在操作过程中使用含氟气体，这是一种与使用和以气体形式储存有关的化合物，具有重大的安全风险。目前的现场氟存储策略使用低浓度的气体混合物来最大限度地减少暴露风险，这使得这些激光系统中的稀有气体混合物在每次向操作系统注入新的氟时损失更多。目前的工作旨在建造和测试基于固体的氟储存库，开发将该系统与工业激光腔集成所需的测量和控制方法，并测试所开发的储存库和运行激光监测系统。污染物管理系统的最新进展也为探索该系统内电极的替代合金提供了机会。这项工作包括测试和表征替代电极材料及其在激光等离子体环境下的腐蚀性能。

This project aims to develop an application-based Fluorine reservoir for Excimer laser technology in collaboration with Lightmachinery Inc., a manufacturer of CO2 and Excimer laser technology based in Ottawa, Ontario. Excimer lasers require the use of Fluorine gas during operation, a compound with significant safety risks associated with it's use and storage in gaseous form. Current on-site fluorine storage strategies use low-concentration gas mixtures to minimize exposure risk, necessitating increased amounts of the rare-gas mixtures in these laser systems to be lost during each injection of new fluorine into the operating system. The current work aims to construct and test a solids-based fluorine reservoir, developing the measurement and control methods required to integrate this system with industrial laser chambers, and testing the developed reservoir and monitoring systems on operational lasers. Recent advancements in contaminant management systems have also presented an opportunity for alternative alloys for the electrodes within this system to be explored. This work involved the testing and characterization of alternative electrode materials and their corrosion properties under a laser plasma environment.********