Development of a moiré-fringe-based nano-positioning system for fabricating high-efficiency x-ray Fresnel zone plates

高效率的x射线光学器件的制造目前在制造和仪器方面都是一个挑战。这个NSERC联盟项目旨在通过INRS、Applied Nanotools Inc. （ANT）和Axis Photonique Inc. （AP）之间的学术-工业合作，共同研究使用光学成像方法的高精度纳米定位。本文的主要目标是演示一种基于莫伊莫尔<s:1>条纹的光学成像方法，以低于20 nm的对准精度对准两个菲涅耳带板（FZPs）。本文提出了三个主要目标：模拟畸变条纹的特性，开发用于纳米定位的光学成像系统，演示对准FZP对的亚20 nm对准，并在x射线成像系统中进行测试。INRS， ANT和AP将提供必要和互补的专业知识，涵盖本申请中提出的所有研究任务。各方承诺经常进行互动和沟通，以确保项目的进展，并促进技术转让。

Fabrication of highly efficient x-ray optical devices is currently a challenge in both manufacturing and instrumentation. This NSERC Alliance project aims to collaboratively investigate high-precision nano-positioning using an optical imaging approach via an academia-industry collaboration among INRS, Applied Nanotools Inc. (ANT), and Axis Photonique Inc. (AP). The main goal is to demonstrate a moiré-fringe-based optical imaging method to align two Fresnel zone plates (FZPs) with sub-20 nm alignment accuracy. In total, three Aims are proposed, which involve simulating characteristics of moiré fringes due to misalignment, developing an optical imaging system for nano-positioning, demonstrating sub-20 nm alignment in aligned FZP pair, and testing it in an x-ray imaging system. INRS, ANT, and AP will provide necessary and complementary expertise that encompasses all research tasks proposed in this application. All sides are committed to frequent interaction and communication to ensure the progress of this project and to facilitate the technology transfer. Aiming to demonstrate the proposed light-based nano-positioning technique for the advanced fabrication of x-ray optical devices, this Alliance project is expected to significantly benefit ANT by reducing operating expenses, increasing operational safety, producing more efficient FZPs, and opening new markets based on the new capabilities for high-energy x-ray imaging. The high-efficiency FZPs will also assist AP in its current effort of two-dimensional x-ray ultrafast imaging. Thus, these benefits will boost the sales of both ANT and AP to solidify their current technical team with the potential to open new positions and further enhance their reputations in the field of x-ray optics. All these activities will support the future knowledge-based economy of Canada.