Development of new processes based on a reactor-injector of nanoparticles for plasma deposition of multifunctional and sustainable nanocomposite coatings (RI-plasma)

多功能涂层的概念已经成为创新表面开发的特权。对于几种具有国际竞争力的应用，一个挑战是获得由细小(10 Nm)、孤立(非聚集)和分散良好的纳米颗粒(NP)形成的纳米复合(NC)涂层。在这种背景下，我们希望在这种跨学科的研究合作中，探索一种前沿的、“安全的设计”、通用、绿色和可扩展的方法来沉积多功能和可持续的NC薄膜的潜力。具有很高工业应用潜力的靶向方法是基于将NPs(基于Kemstream的商业雾化器)与先进的等离子体工艺耦合的反应堆-注射器。更具体地说，这种方法允许在将液态有机金属前体注入沉积反应器之前合成NPs。这防止了与液滴蒸发有关的任何结块，并进一步减少了在合成和加工过程中操纵NPs所带来的潜在的人类和环境风险。在第一步中，将识别和开发用于合成金属氧化物纳米颗粒的金属有机前驱体，并确定适合于RI适应的水解的实验参数。然后，将在两种类型的非平衡(或非热)等离子体反应堆中进行NPs的注入，这两种类型的非平衡(或非热)等离子反应堆对加拿大Plamionique公司感兴趣，即用于分批处理的减压电容式射频放电和用于卷到卷连续处理的常压均匀介质阻挡放电。根据我们的工业合作伙伴赛峰提出的创新战略以及纳米涂层在航空和太空探索领域的极高附加值(A&S)，将特别关注基于分散在包括类钻石碳在内的各种基质中的金属氧化物(氧化锌和氧化镍)纳米颗粒的纳米颗粒的纳米薄膜。具体地说，我们将重点介绍推动多功能和可持续NC薄膜物理化学性质演变的所有因素，特别是它们在极端老化条件下的机械性能。

The concept of multifunctional coatings has become a prerogative in the development of innovative surfaces. For several internationally competitive applications, one challenge is to obtain nanocomposite (NC) coatings formed by small (<10 nm), isolated (non-aggregated) and well-dispersed nanoparticles (NPs). In this context, we wish to explore in this interdisciplinary research collaboration, the potential of a front-edge, "safe-by-design", versatile, green, and scalable method for deposition of multifunctional and sustainable NC thin films. The targeted method with high potential for industrial applications is based on a reactor-injector of NPs (based on Kemstream's commercial atomizer) coupled to advanced plasma processes. More specifically, this method allows to synthesize NPs from liquid organometallic precursors just before their injection into a deposition reactor. This prevents any agglomeration associated with the vaporization of droplets and further reduces potential human and environmental risks linked to the manipulation of NPs during synthesis and processing. In a first step, organometallic precursors will be identified and developed for the synthesis of metal oxide NPs and the experimental parameters suitable for RI-adapted hydrolysis will be determined. The injection of NPs will then be carried out in two types of non-equilibrium (or non-thermal) plasma reactors of interest to the Canadian company Plasmionique, namely reduced-pressure capacitive RF discharges for batch-like processing and homogeneous dielectric barrier discharges at atmospheric pressure for roll-to-roll continuous treatments. In line with the innovation strategy expressed by our industrial partner Safran and the very high added value of NC coatings in the fields of aeronautics and space exploration (A&S), special attention will be devoted to NC thin films based on NPs of metal oxides (ZnO and NiOx) dispersed in various matrices including "diamond-like carbon". Specifically, we will focus on all the factors driving the evolution of the physical and chemical properties of multifunctional and sustainable NC thin films, and, in particular, their mechanical properties under extreme ageing conditions.