Controlled scalable synthesis of uniform, high-quality monolayer and few-layer MoS2 films.

Controlled scalable synthesis of uniform, high-quality monolayer and few-layer MoS2 films.
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DOI:
10.1038/srep01866
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发表时间:
2013
期刊:
影响因子:
4.6
通讯作者:
Cao L
Cao L
中科院分区:
综合性期刊3区
文献类型:
--
作者:
Yu Y;Li C;Liu Y;Su L;Zhang Y;Cao L

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具有单层原子的二维 (2D) 材料代表了对垂直方向材料尺寸的最终控制。硫化钼 (MoS2) 单层的直接带隙为 1.8 eV,为将半导体科学和技术微型化至真正的原子尺度提供了前所未有的前景。最近的研究确实证明了 2D MoS2 在场效应晶体管、低功率开关、光电子学和自旋电子学等领域的前景。然而,由于缺乏生产大面积、均匀和高质量 MoS2 单层的能力,二维 MoS2 器件的开发一直被推迟。在这里,我们提出了一种自限制方法,可以在厘米面积上生长高质量的单层和少层 MoS2 薄膜,具有前所未有的均匀性和可控性。这种方法与半导体行业的标准制造工艺兼容。它为二维 MoS2 实用器件的开发铺平了道路,并为基础研究开辟了新途径。
Two dimensional (2D) materials with a monolayer of atoms represent an ultimate control of material dimension in the vertical direction. Molybdenum sulfide (MoS2) monolayers, with a direct bandgap of 1.8 eV, offer an unprecedented prospect of miniaturizing semiconductor science and technology down to a truly atomic scale. Recent studies have indeed demonstrated the promise of 2D MoS2 in fields including field effect transistors, low power switches, optoelectronics, and spintronics. However, device development with 2D MoS2 has been delayed by the lack of capabilities to produce large-area, uniform, and high-quality MoS2 monolayers. Here we present a self-limiting approach that can grow high quality monolayer and few-layer MoS2 films over an area of centimeters with unprecedented uniformity and controllability. This approach is compatible with the standard fabrication process in semiconductor industry. It paves the way for the development of practical devices with 2D MoS2 and opens up new avenues for fundamental research.
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