Drilling of aluminum and copper films with femtosecond double-pulse laser
Drilling of aluminum and copper films with femtosecond double-pulse laser
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飞秒双脉冲激光对铝膜和铜膜进行钻孔
DOI：
10.1016/j.optlastec.2016.01.001
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发表时间：
2016-06
影响因子：
5
通讯作者：
Hu Zhan
中科院分区：
文献类型：
--
作者：
Wang Qinxin;Luo Sizuo;Chen Zhou;Qi Hongxia;Deng Jiannan;Hu Zhan
用飞秒双脉冲激光对铝和铜薄膜进行钻孔。双脉冲延时扫描范围从−75 ps到90 ps。通过记录通过样品的光传输来监测钻孔过程，并通过光学显微镜分析钻孔的形貌。研究发现，穿透时间、钻孔过程中孔的演化、再沉积材料、再沉积区域直径和孔的直径随双脉冲延迟的变化而变化，且两种金属的情况不同。沿着双脉冲延迟轴，可以观察到三个不同的时间常数，一个是几十皮秒的慢时间常数，一个是几皮秒的快时间常数，还有一个是振荡模式。从等离子体屏蔽、电子-声子耦合、激光与液相强耦合、铝的氧化、激光诱导的温度和压力振荡以及羽流粒子的雾化机理等方面对结果进行了讨论。
Aluminum and copper films are drilled with femtosecond double-pulse laser. The double-pulse delay is scanned from −75 ps to 90 ps. The drilling process is monitored by recording the light transmitted through the sample, and the morphology of the drilled holes is analyzed by optical microscopy. It is found that, the breakthrough time, the hole evolution during drilling, the redeposited material, the diameters of the redeposited area and the hole, change as functions of double-pulse delay, and are different for the two metals. Along the double-pulse delay axis, three different time constants are observed, a slow one of a few tens of picoseconds, a fast one of a few picoseconds, and an oscillation pattern. Results are discussed based on the mechanisms of plasma shielding, electron–phonon coupling, strong coupling of laser with liquid phase, oxidation of aluminum, laser induced temperature and pressure oscillations, and the atomization of plume particles.
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