Si delta doping inside InAs/GaAs quantum dots with different doping densities

Si delta doping inside InAs/GaAs quantum dots with different doping densities
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不同掺杂浓度的 InAs/GaAs 量子点内 Si δ 掺杂

DOI:
10.1116/1.4732462
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发表时间:
2012-07
期刊:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
影响因子:
--
通讯作者:
Wang, Zhanguo
Wang, Zhanguo
中科院分区:
其他
文献类型:
--
作者:
Wang, Ke-Fan;Gu, Yongxian;Yang, Xiaoguang;Yang, Tao;Wang, Zhanguo

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在InAs/GaAs自组装量子点(QD)的生长过程中,在初始QD形成过程中进行了不同掺杂浓度的Si δ掺杂。原子力显微镜 (AFM) 显示这种 Si 掺杂对 QD 形态的影响很小。导电 AFM 测量表明,表面量子点上的电流在低掺杂密度下增加,但在高掺杂密度下意外减少。温度依赖性光致发光 (PL) 测量表明,优化的 Si 掺杂密度 (5 × 1011 cm−2) 提高了 125 至 225 K 中间温度范围内的 PL 热稳定性,并将室温下的 PL 强度提高了 35 倍。这些结果表明,Si 掺杂密度对 InAs 量子点的电学和光学性能起着关键作用。
During the growth process of InAs/GaAs self-assembled quantum dots (QDs), Si delta doping with different doping densities was carried out during initial QD formation. Atomic force microscopy (AFM) reveals that this Si doping affects the QD morphology only slightly. Conductive AFM measurements show that the current on the surface QDs increases at low doping densities, but decreases unexpectedly at high doping densities. Temperature-dependent photoluminescence (PL) measurements show that an optimized Si doping density (5 × 1011 cm−2) improves the PL thermal stability for an intermediate temperature range from 125 to 225 K and enhances the PL intensity up to 35 times at room temperature. These results indicate that the Si doping density plays a key role in the electrical and optical properties of InAs QDs.
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