Co-synthesis of vertical graphene nanosheets and high-value gases using inductively coupled plasma enhanced chemical vapor deposition
Co-synthesis of vertical graphene nanosheets and high-value gases using inductively coupled plasma enhanced chemical vapor deposition
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利用电感耦合等离子体增强化学气相沉积法共合成垂直石墨烯纳米片和高价值气体
DOI：
10.1088/2058-6272/aacda4
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发表时间：
2018-06
影响因子：
1.7
通讯作者：
Jianhua Yan
中科院分区：
文献类型：
--
作者：
Jian Yang;Ruiyang Xu;Angjian Wu;Xiaodong Li;Li Li;Wangjun Shen;Jianhua Yan
利用电感耦合等离子体增强化学气相沉积（ICPECVD）实现了垂直石墨烯纳米片（VG）和高价值气体的一步可控合成。通过电诊断和光学发射光谱揭示了 ICPECVD 过程的基本物理特性。线圈电流和电压随着注入功率的增加而线性增加，并且在300至700 nm的波长处检测到CH、C2、H2和H，这意味着产生了丰富的石墨烯构建物种。通过压力、温度、气体比例等操作条件的变化，系统地表征了固体碳产品石墨烯纳米片的形貌和结构。结果表明，适当的操作条件对于石墨烯纳米片的生长过程是必不可少的。在本工作中，在压力、加热温度、施加功率和气体比例分别为600 mTorr、800 °C、500 W和20:20:15下取得了优化结果，并且CH4和H2浓度的增加对非晶碳的刻蚀具有积极作用。此外，检测到主要废气为H2 和C2 碳氢化合物。在废气中测得的H2和C2H2的选择性分别达到52%和8%，这意味着自由基反应和电子碰撞解离的过程。基于对光谱、电学参数和合成产物的综合研究，可以推测ICPECVD中碰撞、解离、扩散等反应机理，为实验和工业应用提供可能的指导。
One-step controllable synthesis of vertical graphene nanosheets (VGs) and high-value gases was achieved using inductively coupled plasma enhanced chemical vapor deposition (ICPECVD). The basic physical properties of the ICPECVD process were revealed via electrical diagnosis and optical emission spectroscopy. The coil current and voltage increased linearly with the augmenting of injected power, and CH, C2, H2 and H were detected at a wavelength from 300 to 700 nm, implying the generation of abundant graphene-building species. The morphology and structure of solid carbon products, graphene nanosheets, were systemically characterized in terms of the variations of operating conditions, such as pressure, temperature, gas proportion, etc. The results indicated that an appropriate operating condition was indispensable for the growth process of graphene nanosheets. In the present work, the optimized result was achieved at the pressure, heating temperature, applied power and gas proportion of 600 mTorr, 800 °C, 500 W and 20:20:15, respectively, and the augmenting of both CH4 and H2 concentrations had a positive effect on the etching of amorphous carbon. Additionally, H2 and C2 hydrocarbons were detected as the main exhaust gases. The selectivity of H2 and C2H2, measured in exhaust gases, reached up to 52% and 8%, respectively, which implied a process of free radical reactions and electron collision dissociation. Based on a comprehensive investigation of spectral and electrical parameters and synthesized products, the reaction mechanism of collision, dissociation, diffusion, etc, in ICPECVD could be speculated, providing a probable guide for experimental and industrial applications.
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通过感应耦合等离子体辅助化学气相沉积将废猪油升级改造为垂直石墨烯片
DOI：
10.3390/nano7100318
发表时间：
2017-10-12
期刊：
Nanomaterials (Basel, Switzerland)
影响因子：
--
作者：
Wu A;Li X;Yang J;Du C;Shen W;Yan J
通讯作者：
Yan J
影响因子：
9.9
作者：
Lianchang Zhang;Zhiwen Shi;Yi Wang;Rong Yang;D. Shi;Guangyu Zhang
通讯作者：
Lianchang Zhang;Zhiwen Shi;Yi Wang;Rong Yang;D. Shi;Guangyu Zhang
影响因子：
7.2
作者：
Hao Linxing;Gang Chen;Yaoguang Yu;Yansong Zhou;Zhonghui Han;Yue Liu
通讯作者：
Hao Linxing;Gang Chen;Yaoguang Yu;Yansong Zhou;Zhonghui Han;Yue Liu
影响因子：
3.8
作者：
Vizireanu, S.;Stoica, S. D.;Dinescu, G.
通讯作者：
Dinescu, G.
影响因子：
4
作者：
A. Brezmes;C. Breitkopf
通讯作者：
A. Brezmes;C. Breitkopf