Direct laser writing of 3D electrodes on flexible substrates.
Direct laser writing of 3D electrodes on flexible substrates.
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DOI：
10.1038/s41467-023-39152-7
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发表时间：
2023-06-17
影响因子：
16.6
通讯作者：
Gardner, Timothy J.
中科院分区：
文献类型：
--
作者：
Brown, Morgan A.;Zappitelli, Kara M.;Singh, Loveprit;Yuan, Rachel C.;Bemrose, Melissa;Brogden, Valerie;Miller, David J.;Smear, Matthew C.;Cogan, Stuart F.;Gardner, Timothy J.
本报告描述了一种集成在薄膜柔性电缆上的3D微电极阵列，用于小动物的神经记录。该制造工艺结合了传统的硅薄膜加工技术和通过双光子光刻以微米分辨率直接激光写入3D结构。之前已经描述了3D打印电极的直接激光写入，但该报告是第一个提供生产高纵横比结构的方法。一个原型，一个间距为300微米的16通道阵列，展示了从鸟类和小鼠大脑中成功捕获的电生理信号。其他设备包括90 µm间距阵列，穿透鸟类硬脑膜的仿生蚊子针，以及具有增强表面积的多孔电极。本文描述的快速3D打印和晶圆级方法将使高效的器件制造和新的研究能够检查电极几何形状和电极性能之间的关系。应用包括小型动物模型、神经接口、视网膜植入物和其他需要紧凑、高密度3D电极的设备。本报告描述了一个3D微电极阵列集成在一个薄膜柔性电缆上，使用传统的薄膜加工技术和直接激光写入的3D结构在微米分辨率通过双光子光刻神经记录。
This report describes a 3D microelectrode array integrated on a thin-film flexible cable for neural recording in small animals. The fabrication process combines traditional silicon thin-film processing techniques and direct laser writing of 3D structures at micron resolution via two-photon lithography. Direct laser-writing of 3D-printed electrodes has been described before, but this report is the first to provide a method for producing high-aspect-ratio structures. One prototype, a 16-channel array with 300 µm pitch, demonstrates successful electrophysiological signal capture from bird and mouse brains. Additional devices include 90 µm pitch arrays, biomimetic mosquito needles that penetrate through the dura of birds, and porous electrodes with enhanced surface area. The rapid 3D printing and wafer-scale methods described here will enable efficient device fabrication and new studies examining the relationship between electrode geometry and electrode performance. Applications include small animal models, nerve interfaces, retinal implants, and other devices requiring compact, high-density 3D electrodes. This report describes a 3D microelectrode array integrated on a thin-film flexible cable using traditional thin-film processing techniques and direct laser writing of 3D structures at micron resolution via two-photon lithography for neural recording.
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影响因子：
64.5
作者：
Egger R;Tupikov Y;Elmaleh M;Katlowitz KA;Benezra SE;Picardo MA;Moll F;Kornfeld J;Jin DZ;Long MA
通讯作者：
Long MA
视网膜下假体中的支柱电极的优化，以增强靶向神经元的邻近性。
影响因子：
4
作者：
Flores T;Lei X;Huang T;Lorach H;Dalal R;Galambos L;Kamins T;Mathieson K;Palanker D
通讯作者：
Palanker D
影响因子：
3
作者：
Bartels, Jess;Andreasen, Dinal;Kennedy, Philip
通讯作者：
Kennedy, Philip
影响因子：
16.2
作者：
Fukunaga, Izumi;Berning, Manuel;Schaefer, Andreas T.
通讯作者：
Schaefer, Andreas T.
影响因子：
4.7
作者：
Moffitt, MA;McIntyre, CC
通讯作者：
McIntyre, CC