Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies.
Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies.
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DOI：
10.3791/56967
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发表时间：
2018-06-12
期刊：
影响因子：
--
通讯作者：
Wong LS
中科院分区：
文献类型：
--
作者：
Lee IN;Hosford J;Wang S;Hunt JA;Curran JM;Heath WP;Wong LS
扫描探针显微镜已经能够创造各种方法，用于构造（“加法”）自上而下的纳米尺度特征制造。从历史上看，扫描探针光刻的一个主要缺点是单探针系统固有的低吞吐量。这已经通过使用多个探针阵列来提高纳米光刻吞吐量来解决。为了实现这种并行化的纳米光刻，探针阵列与衬底表面的精确对齐至关重要，以便在光刻图案开始时所有探针同时与表面接触。本协议描述了利用聚合物笔光刻技术在厘米大小的区域上产生纳米尺度的特征，通过使用快速、准确和自动对准探针阵列的算法来促进。在这里，硫醇在金衬底上的纳米光刻显示了具有高均匀性的特征的产生。然后用纤维连接蛋白功能化这些模式，用于表面定向细胞形态学研究。
Scanning probe microscopy has enabled the creation of a variety of methods for the constructive ('additive') top-down fabrication of nanometer-scale features. Historically, a major drawback of scanning probe lithography has been the intrinsically low throughput of single probe systems. This has been tackled by the use of arrays of multiple probes to enable increased nanolithography throughput. In order to implement such parallelized nanolithography, the accurate alignment of probe arrays with the substrate surface is vital, so that all probes make contact with the surface simultaneously when lithographic patterning begins. This protocol describes the utilization of polymer pen lithography to produce nanometer-scale features over centimeter-sized areas, facilitated by the use of an algorithm for the rapid, accurate, and automated alignment of probe arrays. Here, nanolithography of thiols on gold substrates demonstrates the generation of features with high uniformity. These patterns are then functionalized with fibronectin for use in the context of surface-directed cell morphology studies.
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