A novel externally charged Fe-doped TiO2 thin film with extraordinary oxygen sensitivity

A novel externally charged Fe-doped TiO2 thin film with extraordinary oxygen sensitivity
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一种新型外带电铁掺杂 TiO2 薄膜,具有非凡的氧敏感性

DOI:
10.1088/0031-8949/2007/t129/068
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发表时间:
2007-12
期刊:
影响因子:
2.9
通讯作者:
H F Zhang
H F Zhang
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
G R Han;W J Weng;P Y Du;A F Zhang;H F Zhang

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采用溶胶-凝胶法在石英玻璃和重掺杂p型硅衬底上制备了不同结构的Fe掺杂TiO 2薄膜。通过改变薄膜的r值来测量薄膜的氧敏性能
Different configurations of Fe-doped TiO2 thin films deposited on both quartz glass and heavily doped p-type silicon substrates were prepared by the sol–gel method. Oxygen-sensing properties of the TiO2 thin films were measured through the variations in r
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