Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording.
Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording.
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无定形硅碳化物超大型电极阵列，用于神经刺激和记录。
DOI：
10.1088/1741-2552/aa8f8b
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发表时间：
2018-03
影响因子：
4
通讯作者：
Cogan SF
中科院分区：
文献类型：
--
作者：
Deku F;Cohen Y;Joshi-Imre A;Kanneganti A;Gardner TJ;Cogan SF
对留置皮质微电极的异物反应限制了神经刺激和记录的可靠性，特别是对于行为动物的长期应用。这种反应损害神经装置的长期稳定性的程度取决于许多因素，包括电极结构中使用的材料、尺寸和留置结构的几何形状。在这里，我们报告基于非晶碳化硅（a-SiC）的微电极阵列（MEA）的发展。该技术利用a-SiC的长期稳定性，并采用半导体制造工艺来制造具有小柄尺寸的MEA。采用等离子体增强化学气相沉积法沉积a-SiC薄膜，并通过薄膜光刻技术进行图案化。为了提高小接触面积的刺激和记录能力，我们研究了电极部位上的低阻抗涂层。在磷酸盐缓冲盐水中表征组装的器械的电化学性能。利用a-SiC作为主要结构元件和封装的MEA被成功地制造。这些a-SiC MEA具有16个穿透柄。每个柄的横截面积小于60 μm2，电极部位的几何表面积在20-200 μm2之间变化。TiN和SIROF的电极涂层将1 kHz电极阻抗从100 μm2 Au电极位点的约2.8 MΩ降低到小于100 kΩ，并将电荷注入容量增加到大于3 mC/cm 2的值。最后，我们通过记录斑马雀基底神经节核和大鼠运动皮层的神经活动来证明功能。a-SiC MEA在微电极的开发方面提供了显著的进步，多年来，微电极一直依赖于硅平台进行器件制造。这些柔性a-SiC MEA具有减少组织损伤和减少异物反应的潜力。该技术是有前途的，具有临床转化和大规模生产的潜力。
Foreign body response to indwelling cortical microelectrodes limits the reliability of neural stimulation and recording, particularly for extended chronic applications in behaving animals. The extent to which this response compromises the chronic stability of neural devices depends on many factors including the materials used in the electrode construction, the size, and geometry of the indwelling structure. Here, we report on the development of microelectrode arrays (MEAs) based on amorphous silicon carbide (a-SiC). This technology utilizes a-SiC for its chronic stability and employs semiconductor manufacturing processes to create MEAs with small shank dimensions. The a-SiC films were deposited by plasma enhanced chemical vapor deposition and patterned by thin-film photolithographic techniques. To improve stimulation and recording capabilities with small contact areas, we investigated low impedance coatings on the electrode sites. The assembled devices were characterized in phosphate buffered saline for their electrochemical properties. MEAs utilizing a-SiC as both the primary structural element and encapsulation were fabricated successfully. These a-SiC MEAs had 16 penetrating shanks. Each shank has a cross-sectional area less than 60 μm2 and electrode sites with a geometric surface area varying from 20–200 μm2. Electrode coatings of TiN and SIROF reduced 1 kHz electrode impedance to less than 100 kΩ from ~2.8 MΩ for 100 μm2 Au electrode sites and increased the charge injection capacities to values greater than 3 mC/cm2. Finally, we demonstrated functionality by recording neural activity from basal ganglia nucleus of Zebra Finches and motor cortex of rat. The a-SiC MEAs provide a significant advancement in the development of microelectrodes that over the years has relied on silicon platforms for device manufacture. These flexible a-SiC MEAs have the potential for decreased tissue damage and reduced foreign body response. The technique is promising and has potential for clinical translation and large scale manufacturing.
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影响因子：
4
作者：
Barrese JC;Aceros J;Donoghue JP
通讯作者：
Donoghue JP
DOI：
10.1002/jbm.b.31223
发表时间：
2009-05
期刊：
Journal of biomedical materials research. Part B, Applied biomaterials
影响因子：
--
作者：
Cogan SF;Ehrlich J;Plante TD;Smirnov A;Shire DB;Gingerich M;Rizzo JF
通讯作者：
Rizzo JF
影响因子：
4.9
作者：
Cogan, SF;Edell, DJ;Edell, R
通讯作者：
Edell, R
影响因子：
3
作者：
CHING, S;DUDEK, R;TABET, E
通讯作者：
TABET, E
影响因子：
3
作者：
Chen, You-Yin;Lai, Hsin-Yi;Lin, Si-Yue
通讯作者：
Lin, Si-Yue