Challenge to EDM Slicing of Single Crystal SiC with Blade Electrode Utilizing a Reciprocating Worktable
Challenge to EDM Slicing of Single Crystal SiC with Blade Electrode Utilizing a Reciprocating Worktable
复制标题
使用往复工作台的刀片电极对单晶 SiC 进行 EDM 切片的挑战
DOI：
10.1016/j.procir.2016.02.268
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Kohzoh Abe
中科院分区：
文献类型：
--
作者：
Yonghua Zhao;Masanori Kunieda;Kohzoh Abe
单晶碳化硅（SiC）具有宽带隙、高介电强度、高耐热性和高电子饱和漂移速度等优异的物理性能，是制造下一代电力电子器件的理想材料。然而，由于SiC的硬度极高，采用传统的磨料多线锯切割方法切割SiC晶片非常耗时且成本高，特别是当SiC晶锭的直径变大时。电火花线切割法是近年来发展起来的一种替代SiC晶锭的切割方法。然而，在此过程中，线材振动和断丝问题是不可避免的。线振动导致切割精度低，并且线断裂导致切割效率低。本研究针对这些问题，提出一种利用刀形电极进行碳化硅电火花切片的新方法。切片过程是通过施加一个张紧的刀片工具电极和工件之间的相对运动，利用往复运动的刀具。本文详细介绍了实验装置的研制和加工实验。通过切片实验，研究了刀具磨损率、切片速度和切缝损失，讨论了这种新方法的特点。
Single crystal silicon carbide is a promising material for producing next-generation power electronic devices owing to its outstanding physical properties of wide band gap, high dielectric strength, high heat resistance and high electron saturation drift velocity etc. However, slicing of SiC wafer is very time and cost consuming with conventional abrasive multi-wire saw method due to the extremely high hardness of SiC, especially when the diameter of SiC ingot becomes larger. In recent years wire EDM slicing method is being developed as an alternative method for wafering SiC ingots. However, wire vibration and wire breakage problems are inevitable in the process. Wire vibration causes a low cutting accuracy and wire breakage results in a low cutting efficiency. In this study, aiming to solve these problems and improve the EDM slicing performances of SiC, a new EDM wafering method which utilizes a blade electrode is proposed. The slicing process was realized by applying a relative motion between a tensioned blade tool electrode and a workpiece making use of a reciprocating worktable. The development of the experimental setup and the machining experiments are described in detail in this paper. The tool wear ratio, slicing speed, and kerf loss were investigated through slicing experiments and the characteristics of this new method are discussed.
轨道形断面线电极多线电火花切割SiC的基础研究
DOI：
10.1016/j.procir.2013.03.052
发表时间：
2013
期刊：
Procedia CIRP
影响因子：
--
作者：
Atsushi Kimura;Y. Okamoto;A. Okada;J. Ohya;T. Yamauchi
通讯作者：
T. Yamauchi
DOI：
10.4028/www.scientific.net/msf.778-780.776
发表时间：
2014
期刊：
Materials Science Forum
影响因子：
--
作者：
Masumi Ogawa;K. Mine;Seiki Fuchiyama;Yasuhiro Tawa;Tomohisa Kato
通讯作者：
Tomohisa Kato
DOI：
10.4028/www.scientific.net/msf.600-603.855
发表时间：
2008
期刊：
Materials Science Forum
影响因子：
--
作者：
Tomohisa Kato;T. Noro;Hideaki Takahashi;S. Yamaguchi;K. Arai
通讯作者：
K. Arai