Development of a new surface acoustic wave based gyroscope on a X-112°Y LiTaO3 substrate.
Development of a new surface acoustic wave based gyroscope on a X-112°Y LiTaO3 substrate.
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DOI：
10.3390/s111110894
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
He S
中科院分区：
文献类型：
--
作者：
Wang W;Liu J;Xie X;Liu M;He S
研制了一种基于声表面波(SAW)陀螺效应的新型微陀螺。用表面有效介电系数法研究了声表面波在小转速和小频率比范围内的陀螺效应。理论分析表明，旋转的X-112°Y LiTaO_3衬底有较大的速度漂移。然后，在同一片X-112°Y LiTaO_3芯片上制作了两条方向相反、工作频率为160 MHz的SAW延迟线，作为传感元件的两个SAW振荡器的反馈。采用单相单向换能器(SPUDT)和梳状换能器构成延迟线，以提高振荡器的频率稳定度。由于受科里奥利力的作用，压电体的旋转引起声表面波传播速度的漂移，从而导致声表面波器件的频移，从而对传感器的性能进行评价。同时，采用差动结构，使灵敏度提高一倍，并补偿了温度效应。利用精密速率表对制作的声表面波陀螺的性能进行了实验评价。在角速率达1,000度时，S的灵敏度为1.332赫兹，S−1，−1，且具有良好的线性。
A new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysis indicates that the larger velocity shift was observed from the rotated X-112°Y LiTaO3 substrate. Then, two SAW delay lines with reverse direction and an operation frequency of 160 MHz are fabricated on a same X-112°Y LiTaO3 chip as the feedback of two SAW oscillators, which act as the sensor element. The single-phase unidirectional transducer (SPUDT) and combed transducers were used to structure the delay lines to improve the frequency stability of the oscillator. The rotation of a piezoelectric medium gives rise to a shift of the propagation velocity of SAW due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. Meanwhile, the differential structure was performed to double the sensitivity and compensate for the temperature effects. Using a precise rate table, the performance of the fabricated SAW gyroscope was evaluated experimentally. A sensitivity of 1.332 Hz deg−1 s at angular rates of up to 1,000 deg s−1 and good linearity are observed.
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影响因子：
4.1
作者：
Varadan, VK;Suh, WD;Varadan, VV
通讯作者：
Varadan, VV
影响因子：
8.4
作者：
Wen, Wang;He, Shitang;Yong, Pan
通讯作者：
Yong, Pan
基于剪切水平表面声波陀螺效应的新型微速率传感器
影响因子：
1.5
作者：
Wang, Wen;Xu, Fangqian;Lee, Keekeun
通讯作者：
Lee, Keekeun
影响因子：
4.1
作者：
Wang, Wen;He, Shitang;Pan, Yong
通讯作者：
Pan, Yong
DOI：
10.1088/0960-1317/17/11/014
发表时间：
2007-11-01
影响因子：
2.3
作者：
Lee, Sang Woo;Rhim, Jae Wook;Yang, Sang Sik
通讯作者：
Yang, Sang Sik