A simple method for fabricating free-standing large area fluorinated single-layer graphene with size-tunable nanopores
A simple method for fabricating free-standing large area fluorinated single-layer graphene with size-tunable nanopores
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一种制备具有尺寸可调纳米孔的独立式大面积氟化单层石墨烯的简单方法
DOI：
10.1016/j.carbon.2015.12.070
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发表时间：
2016-04
期刊：
影响因子：
10.9
通讯作者：
Takata Yasuyuki
中科院分区：
文献类型：
--
作者：
Wang Haidong;Kurata Kosaku;Fukunaga Takanobu;Takamatsu Hiroshi;Zhang Xing;Ikuta Tatsuya;Takahashi Koji;Nishiyama Takashi;Ago Hiroki;Takata Yasuyuki
作为一种只有一个原子厚度的固态膜，纳米多孔石墨烯在许多关键应用中引起了人们的极大关注。在这里，关键的挑战是悬浮单层石墨烯（SLG）并钻取具有精确尺寸的纳米孔。在这里，我们报告了一个简单而可靠的路线，使悬浮氟化SLG与尺寸可调的纳米孔。我们的方法包括两个步骤：1.在通过二氟化氙对硅衬底进行深度干法蚀刻之后，在两个金焊盘之间产生独立的SLG带。SLG被氟化5- 13%。与常规的湿法腐蚀方法相比，干法腐蚀工艺简单，孔缺陷和边缘变形小，具有上级优点。由于足够的蚀刻深度，大面积氟化SLG可以悬浮。2.引入聚焦离子束以在石墨烯中钻出初始直径约为20 nm的纳米孔。接着是电子束诱导的碳沉积，纳米孔的直径逐渐减小到小于10 nm。通过改变沉积时间，可以精确地控制纳米孔的尺寸。不再需要高成本的透射电子显微镜。该方法为制备适用于单分子检测的自支撑氟化SLG带提供了一种简单有效的方法。
As a solid-state membrane with only one-atom thickness, nano-porous graphene has attracted intense attention in many critical applications. Here, the key challenge is to suspend a single-layer graphene (SLG) and drill nanopores with precise dimensions. Here, we report a simple and reliable route for making suspended fluorinated SLG with size-tunable nanopores. Our method consists of two steps: 1. a free-standing SLG ribbon was created between two gold pads after deep dry etching of silicon substrate by xenon difluoride. The SLG was fluorinated by 5–13%. Superior to the normal wet etching method, the dry etching process is much simpler and results in less hole-defect and edge deformation. A large area fluorinated SLG can be suspended due to the sufficient etch depth. 2. a focused ion beam was introduced to drill nanopores in graphene with an initial diameter around 20 nm. Followed by an electron beam induced carbon deposition, the diameter of nanopore was gradually decreased to sub-10 nm. By changing the deposition time, the size of nanopore can be precisely controlled. High-cost transmission electron microscope is no longer needed. Our method provides a simple and effective way for preparing free-standing fluorinated SLG ribbon suitable for single-molecule detection.
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