Fast and controllable fabrication of suspended graphene nanopore devices

Fast and controllable fabrication of suspended graphene nanopore devices
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悬浮石墨烯纳米孔器件的快速可控制造

DOI:
10.1088/0957-4484/23/8/085301
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发表时间:
2012-03
期刊:
影响因子:
3.5
通讯作者:
Yu, Dapeng
Yu, Dapeng
中科院分区:
材料科学3区
文献类型:
--
作者:
Liu, Song;Zhao, Qing;Xu, Jun;Yan, Kai;Peng, Hailin;Yang, Fuhua;You, Liping;Yu, Dapeng

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研究了一种聚甲基丙烯酸甲酯辅助干转移方法,将石墨烯微片转移到悬浮SiN芯片上,为进一步的石墨烯纳米孔钻取DNA分析提供了有效和高效的方法。石墨烯微片可以通过电子束光刻技术同时以数千个的大规模制作成设计的形状和尺寸。随后,单个石墨烯微片可以通过特定位点转移打印方法以1 μ m的精度转移到悬浮SiN膜上的目标孔上。在透射电镜下,在转移后的石墨烯膜上钻出直径为3 ~ 20nm的纳米孔。该方法为制备用于DNA分析的石墨烯纳米孔提供了一种快速、可控的方法。
A poly(methyl methacrylate) assisted dry transfer method was developed to transfer graphene microflake onto a suspended SiN chip in an effective and efficient way for further graphene nanopore drilling for DNA analysis. Graphene microflakes can be patterned by e-beam lithography to a designed shape and size on a large scale of a few thousands simultaneously. Subsequently, individual graphene microflakes can be picked up and transferred to a target hole on a suspended SiN membrane with 1 µm precision via a site-specific transfer-printing method. Nanopores with different diameters from 3 to 20 nm were drilled on the as-transferred graphene membrane in a transmission electron microscope. This method offers a fast and controllable way to fabricate graphene nanopores for DNA analyses.
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