Lithographic Processes for the Scalable Fabrication of Micro- and Nanostructures for Biochips and Biosensors.
Lithographic Processes for the Scalable Fabrication of Micro- and Nanostructures for Biochips and Biosensors.
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DOI：
10.1021/acssensors.0c02704
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发表时间：
2021-06-25
期刊：
影响因子：
8.9
通讯作者：
Wong LS
中科院分区：
文献类型：
--
作者：
Fruncillo S;Su X;Liu H;Wong LS
自21世纪初以来，已经进行了广泛的研究，以解决生物芯片和生物传感器制造中的许多挑战，以便将它们用于各种生物医学应用。这些生物芯片和生物传感器设备要么在制造过程中集成生物元件（例如，DNA，蛋白质或细胞），要么在制造后经历不同下游应用的生物功能化，包括传感，诊断，药物筛选和治疗。可扩展光刻技术在半导体工业中已经建立，现在正用于大规模生产此类设备，并进一步发展以满足在具有保留生物活性和精确指定地形的设备基板上精确沉积各种生物元件的需求。本文将讨论能够大规模和批量制造生物芯片和生物传感器的光刻方法。特别是那些允许从10cm2到m2的大面积图案，保持成本效益，高通量（bbb100 cm2 h-1），高分辨率（从微米到纳米尺度），准确性和可重复性。这篇综述将比较各种制造技术，并评论它们的分辨率限制和吞吐量，以及它们如何与设备性能相关，包括灵敏度、检测限、再现性和鲁棒性。
Since the early 2000s, extensive research has been performed to address numerous challenges in biochip and biosensor fabrication in order to use them for various biomedical applications. These biochips and biosensor devices either integrate biological elements (e.g., DNA, proteins or cells) in the fabrication processes or experience post fabrication of biofunctionalization for different downstream applications, including sensing, diagnostics, drug screening, and therapy. Scalable lithographic techniques that are well established in the semiconductor industry are now being harnessed for large-scale production of such devices, with additional development to meet the demand of precise deposition of various biological elements on device substrates with retained biological activities and precisely specified topography. In this review, the lithographic methods that are capable of large-scale and mass fabrication of biochips and biosensors will be discussed. In particular, those allowing patterning of large areas from 10 cm2 to m2, maintaining cost effectiveness, high throughput (>100 cm2 h–1), high resolution (from micrometer down to nanometer scale), accuracy, and reproducibility. This review will compare various fabrication technologies and comment on their resolution limit and throughput, and how they can be related to the device performance, including sensitivity, detection limit, reproducibility, and robustness.
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