Study of Point Spread in the Aberration-Corrected Transmission Electron Microscopy

Study of Point Spread in the Aberration-Corrected Transmission Electron Microscopy
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像差校正透射电子显微镜中点扩散的研究

DOI:
10.1017/s1431927614012823
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发表时间:
2012-09
影响因子:
2.8
通讯作者:
Yao, Yuan
Yao, Yuan
中科院分区:
工程技术4区
文献类型:
--
作者:
Ge, Binghui;Wang, Yumei;Chang, Yunjie;Yao, Yuan

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高精度的原子位置测定是定量电子显微术的必要条件,因此,在结构图像中代表原子的峰的宽度小,分辨率足够高,图像对比度足够强。峰宽通常由仪器的点扩散(PS)决定,但当显微镜的点分辨率达到亚埃量级时,在像差校正透射电子显微术中还应考虑物体的PS,使仪器的PS与物体的PS相当。在这篇文章中,PS的研究与原子序数的变化,样品厚度,球差系数的峰宽与负Cs(NCSI)和正Cs成像(PCSI)模式下,通过动态图像模拟。通过比较不同原子序数、厚度和球差值下的峰宽,发现NCSI模式比PCSI模式具有上级优势,且峰宽较小。
Abstract High precision determination of atomic position is necessary for quantitative electron microscopy so that small width of peaks, which represent atoms in structural images, adequate resolution, and sufficiently strong image contrast are needed. The width of peak is usually determined by the point spread (PS) of instruments, but the PS of objects should also be taken into consideration in aberration-corrected transmission electron microscopy when point resolution of a microscope reaches the sub-angstrom scale, and thus the PS of the instrument is comparable with that of the object. In this article, PS is investigated by studying peak width with variation of atomic number, sample thickness, and spherical aberration coefficients in both negative Cs (NCSI) and positive Cs imaging (PCSI) modes by means of dynamical image simulation. Through comparing the peak width with various atomic number, thickness, and values of spherical aberration, NCSI mode is found to be superior to PCSI considering the smaller width.
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