Facile synthesis of graphene on dielectric surfaces using a two-temperature reactor CVD system

Facile synthesis of graphene on dielectric surfaces using a two-temperature reactor CVD system
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使用双温反应器 CVD 系统在电介质表面轻松合成石墨烯

DOI:
10.1088/0957-4484/24/39/395603
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发表时间:
2013-10
期刊:
影响因子:
3.5
通讯作者:
Chen, X. J.
Chen, X. J.
中科院分区:
材料科学3区
文献类型:
--
作者:
Xu, S. C.;Sun, Z. C.;Gao, X. G.;Chen, X. J.

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使用具有两个温度反应器的化学气相沉积系统证明了石墨烯在介电衬底上的直接沉积。双温反应器用于提供足够的、均匀的浮动Cu原子,并提供用于在介电表面上容易合成石墨烯的温度梯度。蒸发的Cu原子在所提出的方法中催化反应。在低温区和靠近高温区的区域中,C原子和Cu原子分别充当用于形成石墨烯膜的核。在足够且均匀的浮动Cu原子的气氛中形成均匀且高质量的石墨烯膜。拉曼光谱、扫描电子显微镜和原子力显微镜证实了均匀和高质量石墨烯的存在。
Direct deposition of graphene on a dielectric substrate is demonstrated using a chemical vapor deposition system with a two-temperature reactor. The two-temperature reactor is utilized to offer sufficient, well-proportioned floating Cu atoms and to provide a temperature gradient for facile synthesis of graphene on dielectric surfaces. The evaporated Cu atoms catalyze the reaction in the presented method. C atoms and Cu atoms respectively act as the nuclei for forming graphene film in the low-temperature zone and the zones close to the high-temperature zones. A uniform and high-quality graphene film is formed in an atmosphere of sufficient and well-proportioned floating Cu atoms. Raman spectroscopy, scanning electron microscopy and atomic force microscopy confirm the presence of uniform and high-quality graphene.
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