A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes.
A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes.
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DOI：
10.3390/mi12050506
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发表时间：
2021-04-30
期刊：
影响因子：
3.4
通讯作者：
Yang F
中科院分区：
文献类型：
--
作者：
Xu P;Wei Z;Guo Z;Jia L;Han G;Si C;Ning J;Yang F
随着微机电系统（MEMS）陀螺仪设计和制造水平的提高，控制电路系统已成为决定其内部性能的关键环节。然而，电子元件的相位延迟可能会导致一些严重的危害。本研究描述了一种用于MEMS振动陀螺仪的实时电路相位延迟校正系统。利用力再平衡（FTR）闭环检测和正交校正系统，对电路相位延迟对同相和正交（IQ）耦合特性和零速率输出（ZRO）的影响进行了详细的理论分析。通过推导MEMS陀螺仪的幅频、相频和整个控制回路的相位关系，提出了一种实时校正系统，自动调整锁相环的相位参考值，从而补偿实时电路的相位延迟。实验结果表明，该校正系统能够实时准确地测量和补偿电路的相位延迟。此外，可以消除不必要的IQ耦合，ZRO降低755%，达到0.095°/s。该校正系统实现了0.978°/√h的小角度随机游走和9.458°/h的低偏置不稳定性，在室温下的比例因子非线性为255 ppm。在−20 ~ 70℃的温度范围内，ZRO的热漂移降至0.0034°/s/°C。
With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result in some serious hazards. This study described a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis was provided to clarify the influence of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and the zero-rate output (ZRO) utilizing a force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between the amplitude-frequency, the phase-frequency of the MEMS gyroscope, and the phase relationship of the whole control loop, a real-time correction system was proposed to automatically adjust the phase reference value of the phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results showed that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO was decreased by 755% to 0.095°/s. This correction system realized a small angle random walk of 0.978°/√h and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. The thermal drift of the ZRO was reduced to 0.0034°/s/°C at a temperature range from −20 to 70 °C.
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影响因子：
2.7
作者：
Tatar, Erdinc;Alper, Said Emre;Akin, Tayfun
通讯作者：
Akin, Tayfun
影响因子：
3.4
作者：
Abdolvand R;Bahreyni B;Lee JE;Nabki F
通讯作者：
Nabki F
影响因子：
3.4
作者：
Gu, Haoyu;Su, Wei;Liu, Xianxue
通讯作者：
Liu, Xianxue
DOI：
10.3390/s17030567
发表时间：
2017-03-11
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Deppe O;Dorner G;König S;Martin T;Voigt S;Zimmermann S
通讯作者：
Zimmermann S
基于耦合刚度的主动抑制，有效缩短 MEMS 陀螺仪的偏置预热时间
影响因子：
7.9
作者：
Cui, Jian;Zhao, Qiancheng;Yan, Guizhen
通讯作者：
Yan, Guizhen