Development, Fabrication, and Characterization of Hydrogel Based Piezoresistive Pressure Sensors with Perforated Diaphragms.
Development, Fabrication, and Characterization of Hydrogel Based Piezoresistive Pressure Sensors with Perforated Diaphragms.
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DOI：
10.1016/j.sna.2010.05.023
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发表时间：
2010-06
影响因子：
4.6
通讯作者：
Solzbacher, F.
中科院分区：
文献类型：
--
作者：
Orthner, M. P.;Buetefisch, Sebastian;Magda, J.;Rieth, L. W.;Solzbacher, F.
已经证明水凝胶响应于许多外部刺激而膨胀，包括pH、CO2、葡萄糖和离子强度，使得它们可用于检测代谢分析物。为了测量水凝胶溶胀压力，我们已经制造和测试了新型穿孔隔膜压阻式压力传感器阵列，其将压力传感隔膜与穿孔半透膜耦合。2×2阵列的尺寸约为3 × 5 mm 2，由四个宽度为1.0、1.25和1.5 mm的方形传感膜片组成，分别用于测量50、25和5 kPa的满量程压力。在硅隔膜中蚀刻微孔的优化几何形状，以允许分析物扩散到水凝胶材料所在的传感器腔中。14步前侧晶片工艺由商业铸造服务（MSF，法兰克福（Oder），德国）进行，并且使用氢氧化钾（KOH）蚀刻和深反应离子蚀刻（DRIE）的组合产生隔膜孔。使用定制的凸起测试装置进行传感器表征（不使用水凝胶），该测试装置同时测量偏转、压力和电输出。测试结果用于量化传感器灵敏度并证明概念验证。模拟结果表明，灵敏度略有改善穿孔膜片设计，而经验的电气特性表明，穿孔膜片传感器的灵敏度略低于固体膜片传感器。这种差异被认为是由于在钝化层内发现的压应力的影响和差的蚀刻均匀性。新型穿孔膜片传感器功能齐全，灵敏度范围为23至252 μV/V-kPa（FSO= 5至80 mV），在高压下的非线性度高于采用实心膜片的同类传感器。带穿孔膜片（孔=40 μm）的传感器（1.5×1.5 mm 2）的非线性约为10%，而相同的实心膜片传感器在整个200 kPa范围内的非线性约为3%。这是第一次压阻压力传感器与集成的扩散孔检测水凝胶溶胀压力已经制造和测试。
Hydrogels have been demonstrated to swell in response to a number of external stimuli including pH, CO2, glucose, and ionic strength making them useful for detection of metabolic analytes. To measure hydrogel swelling pressure, we have fabricated and tested novel perforated diaphragm piezoresistive pressure sensor arrays that couple the pressure sensing diaphragm with a perforated semi-permeable membrane. The 2×2 arrays measure approximately 3 × 5 mm2 and consist of four square sensing diaphragms with widths of 1.0, 1.25, and 1.5 mm used to measure full scale pressures of 50, 25, and 5 kPa, respectively. An optimized geometry of micro pores was etched in silicon diaphragm to allow analyte diffusion into the sensor cavity where the hydrogel material is located. The 14-step front side wafer process was carried out by a commercial foundry service (MSF, Frankfurt (Oder), Germany) and diaphragm pores were created using combination of potassium hydroxide (KOH) etching and deep reactive ion etching (DRIE). Sensor characterization was performed (without the use of hydrogels) using a custom bulge testing apparatus that simultaneously measured deflection, pressure, and electrical output. Test results are used to quantify the sensor sensitivity and demonstrate proof-of-concept. Simulations showed that the sensitivity was slightly improved for the perforated diaphragm designs while empirical electrical characterization showed that the perforated diaphragm sensors were slightly less sensitive than solid diaphragm sensors. This discrepancy is believed to be due to the influence of compressive stress found within passivation layers and poor etching uniformity. The new perforated diaphragm sensors were fully functional with sensitivities ranging from 23 to 252 μV/V-kPa (FSO= 5 to 80mV), and show a higher nonlinearity at elevated pressures than identical sensors with solid diaphragms. Sensors (1.5×1.5 mm2) with perforated diaphragms (pores=40 μm) have a nonlinearity of approximately 10% while for the identical solid diaphragm sensor it was roughly 3 % over the entire 200 kPa range. This is the first time piezoresistive pressure sensors with integrated diffusion pores for detection of hydrogel swelling pressure have been fabricated and tested.
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DOI：
10.1016/j.msec.2003.11.002
发表时间：
2004-06-01
期刊：
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
影响因子：
--
作者：
Johnson, BD;Beebe, DJ;Crone, W
通讯作者：
Crone, W
影响因子：
6.2
作者：
Han, IS;Han, MH;Magda, JJ
通讯作者：
Magda, JJ
影响因子：
8.4
作者：
Guenther, M.;Gerlach, G.;Arndt, K. -F.
通讯作者：
Arndt, K. -F.
DOI：
10.1016/s1369-8001(02)00058-6
发表时间：
2002-02-01
影响因子：
4.1
作者：
Olson, JM
通讯作者：
Olson, JM
影响因子：
2.7
作者：
De, SK;Aluru, NR;Moore, J
通讯作者：
Moore, J