Micropatterning of poly(dimethylsiloxane) using a photoresist lift-off technique for selective electrical insulation of microelectrode arrays.
Micropatterning of poly(dimethylsiloxane) using a photoresist lift-off technique for selective electrical insulation of microelectrode arrays.
复制标题
DOI：
10.1088/0960-1317/19/6/065016
复制
发表时间：
2009-05-20
期刊：
影响因子：
--
通讯作者：
Han A
中科院分区：
文献类型：
--
作者：
Park J;Kim HS;Han A
提出了一种基于光刻胶剥离技术的聚二甲基硅氧烷（PDMS）图案化方法，用于制作具有选择性开口的电绝缘层。该方法能够创建具有小特征和各种厚度的PDMS图案，没有任何设计限制，并且不需要复杂的工艺或昂贵的设备。图案化的PDMS层是通过在具有牺牲光致抗蚀剂图案的基板顶部旋涂液相PDMS，然后进行光致抗蚀剂剥离工艺来创建的。通过调整 PDMS 旋涂速度、PDMS 稀释比和牺牲光刻胶厚度等工艺参数，可以精确控制图案化 PDMS 层的厚度 (6.5–24 µm)。小至 15 µm 的 PDMS 特征已成功形成图案，并研究了每个加工参数对最终图案的影响。具有和不具有绝缘层的相邻电极之间的电阻测试表明，图案化的PDMS层能够适当地充当电绝缘层。通过在层顶部培养原代神经元细胞长达两周，证实了图案化 PDMS 层的生物相容性。成功形成了广泛的神经元网络，表明这种PDMS图案化方法可以应用于各种生物传感微器件。通过在包含多电极阵列的柔性基板上成功创建图案化电绝缘层，进一步证明了这种制造方法的实用性。
A poly(dimethylsiloxane) (PDMS) patterning method based on a photoresist lift-off technique to make an electrical insulation layer with selective openings is presented. The method enables creating PDMS patterns with small features and various thicknesses without any limitation in the designs and without the need for complicated processes or expensive equipments. Patterned PDMS layers were created by spin-coating liquid phase PDMS on top of a substrate having sacrificial photoresist patterns, followed by a photoresist lift-off process. The thickness of the patterned PDMS layers could be accurately controlled (6.5–24 µm) by adjusting processing parameters such as PDMS spin-coating speeds, PDMS dilution ratios, and sacrificial photoresist thicknesses. PDMS features as small as 15 µm were successfully patterned and the effects of each processing parameter on the final patterns were investigated. Electrical resistance tests between adjacent electrodes with and without the insulation layer showed that the patterned PDMS layer functions properly as an electrical insulation layer. Biocompatibility of the patterned PDMS layer was confirmed by culturing primary neuron cells on top of the layer for up to two weeks. An extensive neuronal network was successfully formed, showing that this PDMS patterning method can be applied to various biosensing microdevices. The utility of this fabrication method was further demonstrated by successfully creating a patterned electrical insulation layer on flexible substrates containing multi-electrode arrays.
登录
查看更多内容
DOI：
10.1088/0960-1317/18/3/037004
发表时间：
2008-03-01
影响因子：
2.3
作者：
Tong, Jianhua;Simmons, Craig A.;Sun, Yu
通讯作者：
Sun, Yu
影响因子：
12.6
作者：
Duport, S;Millerin, C;Corrèges, P
通讯作者：
Corrèges, P
影响因子：
2.3
作者：
Eon, D;de Poucques, L;Gogolides, E
通讯作者：
Gogolides, E
影响因子：
2.7
作者：
Ryu, KS;Wang, XF;Liu, C
通讯作者：
Liu, C
影响因子：
2.3
作者：
Tsougeni, Katerina;Tserepi, Angeliki;Gogolides, Evangelos
通讯作者：
Gogolides, Evangelos