Defect reduced selectively grown GaN pyramids as template for green InGaN quantum wells

Defect reduced selectively grown GaN pyramids as template for green InGaN quantum wells
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缺陷减少的选择性生长 GaN 金字塔作为绿色 InGaN 量子阱的模板

DOI:
10.1002/pssb.201552427
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发表时间:
2016
期刊:
physica status solidi (b)
影响因子:
--
通讯作者:
P. Michler
P. Michler
中科院分区:
--
文献类型:
--
作者:
J. Wagner;C. Wächter;J. Wild;M. Müller;S. Metzner;P. Veit;G. Schmidt;M. Jetter;F. Bertram;J. Zweck;J. Christen;P. Michler

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本文报道了用金属-有机气相外延(MOVPE)方法在三维GaN模板上生长绿色发射InGaN量子阱。用选区生长(SAG)方法制备的GaN金字塔的小面减小了量子受限斯塔克效应(QCSE)对量子阱发射特性的影响。量子阱的发光特性是下面GaN层结晶质量的一个很好的指标。尤其是金字塔内部空穴的存在,以及翼部区域的层错(SFS)和穿线位错(TDS)的存在,强烈地影响了应变情况和In进入上覆InGaN层的情况。因此,GaN金字塔的晶体质量对有源区的效率和发射性能有很大的影响。因此,引入了一种在GaN缓冲器上进行低温成核的方法,同时考虑到金字塔c面生长表面的减少,同时降低了Ga通量。InGaN量子阱的低温光致发光(PL)特性揭示了金字塔的标准形成和这种修饰生长的不同。阴极发光和透射电子显微镜测量证实了两种生长模式在金字塔内部晶体质量上的差异。
Abstractauthoren We report the growth of green emitting InGaN quantum wells (QWs) by metal‐organic vapor‐phase epitaxy (MOVPE) on three‐dimensional GaN templates. The facets of GaN pyramids, fabricated by selective‐area growth (SAG), reduce the influence of the quantum‐confined Stark effect (QCSE) on the emission properties of the QW. The luminescence properties of a QW are a good indicator for the crystalline quality of the GaN layer beneath. Especially the presence of voids inside the pyramids, as well as stacking faults (SFs) and threading dislocations (TDs) in the wing region strongly influence the strain situation and the incorporation of In into the overlying InGaN layer. Thus, the crystal quality of the GaN pyramid has a strong influence on the efficiency and the emission properties of the active region. Therefore, a low‐temperature nucleation on the GaN buffer in conjunction with a decreasing Ga‐flux taking the decreasing c‐plane growth surface of the pyramid into account was introduced. The low‐temperature photoluminescence (PL) properties of the InGaN QW reveal the differences between the standard formation of the pyramid and this modified growth. Cathodoluminescence (CL) and transmission electron microscopy (TEM) measurements confirm the differences between the two growth modes in the crystal quality of the inner part of the pyramid.
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DOI: --
发表时间: 2011
期刊:
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