Surface acoustic waves in semi-insulating Fe-doped GaN films grown by hydride vapor phase epitaxy

Surface acoustic waves in semi-insulating Fe-doped GaN films grown by hydride vapor phase epitaxy
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氢化物气相外延生长的半绝缘 Fe 掺杂 GaN 薄膜中的表面声波

DOI:
10.1063/1.4893156
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发表时间:
2014-08
影响因子:
4
通讯作者:
Xu, Ke
Xu, Ke
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Huang, Zengli;Zhang, Yumin;Wang, Jianfeng;Xu, Ke

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研究了用氢化物气相外延法在蓝宝石衬底上生长的掺铁半绝缘GaN薄膜中声表面波的传播特性。与原生n型GaN相比,Fe掺杂GaN由于其高电阻率而表现出更高的机电耦合系数。此外,实验上还观察到了具有很高相速度(约7890 m/s)的导波纵向漏声表面波(LLSAW),并通过数值模拟验证了该模式的正确性。在甘油溶液中,LLSAW沿着液/固界面的传播衰减很小,这意味着在高频化学传感中的潜在应用。
The propagation properties of surface acoustic waves (SAWs) in semi-insulating Fe-doped GaN films grown on sapphire substrates by hydride vapor phase epitaxy are investigated. Compared with native n-type GaN, Fe-doped GaN exhibits a higher electromechanical coupling coefficient due to its high electrical resistivity. In addition, guided longitudinal leaky surface acoustic wave (LLSAW) was observed experimentally with a very high phase velocity (about 7890 m/s), and this mode was verified by numerical simulations. The small propagation attenuation of LLSAW along liquid/solid interfaces was demonstrated in glycerol solutions, which implies the potential applications in high-frequency chemical sensing.
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