Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror

Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror
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使用超短 Kirkpatrick-Baez 镜设计超过 100 nm 空间分辨率的软 X 射线荧光显微镜

DOI:
10.1117/12.2632949
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发表时间:
2022
期刊:
Advances in X-Ray/EUV Optics and Components XVII
影响因子:
--
通讯作者:
Mimura Hidekazu
Mimura Hidekazu
中科院分区:
--
文献类型:
--
作者:
Shimamura Takenori;Takeo Yoko;Moriya Fumika;Kimura Takashi;Shimura Mari;Senba Yasunori;Kishimoto Hikaru;Ohashi Haruhiko;Shimba Kenta;Jimbo Yasuhiko;Mimura Hidekazu

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Kirkpatrick-Baez(KB)镜是一种反射聚焦装置,其在掠入射设置中顺序地定位一对交叉镜。通常,这种类型的设备提供20 mm或更长的相对较长的工作距离,这允许样品以各种配置安装。然而,长工作距离与数值孔径和缩小因子之间存在权衡,导致KB镜在软X射线区域的亚微米焦点尺寸存在缺陷。本研究探讨了一种超短KB镜组成的2和8毫米长的反射镜的焦距为2和8毫米,分别。它的缩小率被设计为高达10000和它的焦点尺寸理论上可以低于50 nm,在1 keV的光子能量。为了证明基于这种聚焦装置的X射线纳米探针用于X射线显微镜,低能量X射线荧光(LEXRF)技术被并入到聚焦系统中。该系统的目的是观察生物样品中的轻元素。在X射线荧光产率进行了估计,实验装置进行了检查的前向和侧向散射配置。初步研究检查了荧光检测器的性能和荧光检测的生物和药物样品在传统的背散射配置。与聚集大约10%的入射X射线的衍射聚焦设备相比,反射式超短KB镜可以通过更有效地将X射线收集到其纳米探针来使LEXRF受益,从而增强样本的荧光信号。
A Kirkpatrick-Baez (KB) mirror is a reflective focusing device that sequentially positions a pair of crossed mirrors in a grazing-incidence setup. Typically, this type of device offers a relatively long working distance of 20 mm or longer, which allows specimens to be installed in various configurations. However, there is a tradeoff between the long working distance and both the numerical aperture and demagnification factor, resulting in drawbacks for KB mirrors for a sub-micron focus size in a soft-X-ray region. This research explores an ultrashort KB mirror composed of 2- and 8-mm-long mirrors with focal lengths of 2 and 8 mm, respectively. Its demagnification is designed to be up to 10000 and its focus size can theoretically be below 50 nm at a photon energy of 1 keV. To demonstrate an X-ray nanoprobe based on this focusing device for X-ray microscopy, the low energy X-ray fluorescence (LEXRF) technique is incorporated into the focusing system. The aim of this LEXRF system is to observe light elements in biological specimens. After X-ray fluorescence yields were estimated, the experimental setup was examined for a forward- and side-scattering configuration. Preliminary studies examined the fluorescence detector performance and the fluorescence detection of biological and pharmaceutical specimens in the traditional backscattering configuration. Compared with diffractive focusing devices, which condense approximately 10% of the incident X-rays, the reflective ultrashort KB mirror can benefit LEXRF by more efficiently collecting X-rays to its nanoprobe, thus enhancing the fluorescence signals from specimens.
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