Fabrication of textured SnO2:F thin films by spray pyrolysis

Fabrication of textured SnO2:F thin films by spray pyrolysis
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喷雾热解法制备织构化 SnO2:F 薄膜

DOI:
10.1016/j.apsusc.2011.09.026
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发表时间:
2011-11
影响因子:
6.7
通讯作者:
Chen, Yuanqing
Chen, Yuanqing
中科院分区:
材料科学1区
文献类型:
--
作者:
Ren, Yang;Zhao, Gaoyang;Chen, Yuanqing

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通过喷雾热解在钠钙硅玻璃基板上制备具有纹理表面的透明导电 SnO2:F 薄膜。研究了薄膜的结构、形貌、光学和电学性能。结果表明,薄膜结构、形貌、雾度、透射率和方块电阻取决于基材温度和薄膜厚度。在 520°C 下沉积的具有纹理表面的最佳 810nm 厚 SnO2:F 薄膜呈现出具有 (200) 取向的多晶金红石四方结构。该薄膜的方块电阻、可见光区平均透过率和雾度分别为8Ω/□、80.04%和11.07%,适合用作氢化非晶硅太阳能电池的电极。
Transparent conductive SnO2:F thin films with textured surfaces were fabricated on soda–lime–silica glass substrates by spray pyrolysis. Structure, morphology, optical and electrical properties of the films were investigated. Results show that the film structure, morphology, haze, transmittance and sheet resistance are dependent on the substrate temperature and film thickness. An optimal 810nm-thick SnO2:F film with textured surface deposited at 520°C exhibits polycrystalline rutile tetragonal structure with a (200) orientation. The sheet resistance, average transmittance in visible region, and haze of this film were 8Ω/□, 80.04% and 11.07%, respectively, which are suitable for the electrode used in the hydrogenated amorphous silicon solar cells.
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