Gallium Nitride: A Versatile Compound Semiconductor as Novel Piezoelectric Film for Acoustic Tweezer in Manipulation of Cancer Cells

Gallium Nitride: A Versatile Compound Semiconductor as Novel Piezoelectric Film for Acoustic Tweezer in Manipulation of Cancer Cells
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氮化镓:一种多功能化合物半导体,可用作声镊操作癌细胞的新型压电薄膜

DOI:
10.1109/ted.2020.3002498
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发表时间:
2020
影响因子:
3.1
通讯作者:
Sun C
Sun C
中科院分区:
工程技术2区
文献类型:
--
作者:
Sun C

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氮化镓(GaN)是一种化合物半导体,由于其压电,热电和压阻特性,具有产生新功能和应用的优势。最近,基于表面声波(SAW)的声镊被开发为一种高效且通用的工具,以操纵纳米和微米颗粒,旨在图案化、分离和混合生物和化学成分。用于制造SAW器件的传统压电材料(例如,钛酸锂)具有低热导率和不能制造多物理和集成器件的缺点。本文主要介绍了GaN基声镊的研制及其在微粒子和生物细胞操纵中的应用。首次将GaN SAW器件与微流体通道集成,形成用于生物应用的声流控芯片。GaNAT证明了其在高功率(高达10 W)下工作的能力,同时保持器件温度低于32°C。利用声流模型对GaNAT内的声压场和粒子运动轨迹进行了数值模拟,模拟结果与聚苯乙烯微球和成纤维细胞、肾肿瘤细胞的实验结果吻合较好。GaNAT允许两种细胞类型分别保持84.5%和92.1%的高活力。
Gallium nitride (GaN) is a compound semiconductor which has advantages to generate new functionalities and applications due to its piezoelectric, pyroelectric, and piezo-resistive properties. Recently, surface acoustic wave (SAW)-based acoustic tweezers were developed as an efficient and versatile tool to manipulate nano- and microparticles aiming for patterning, separating, and mixing biological and chemical components. Conventional piezoelectric materials to fabricate SAW devices such as lithium niobate suffer from its low thermal conductivity and incapability of fabricating multiphysical and integrated devices. This article piloted the development of a GaN-based acoustic tweezer (GaNAT) and its application in manipulating microparticles and biological cells. For the first time, the GaN SAW device was integrated with a microfluidic channel to form an acoustofluidic chip for biological applications. The GaNAT demonstrated its ability to work on high power (up to 10 W) with minimal cooling requirement while maintaining the device temperature below 32°C. Acoustofluidic modeling was successfully applied to numerically study and predict acoustic pressure field and particle trajectories within the GaNAT, which agree well with the experimental results on patterning polystyrene microspheres and two types of biological cells including fibroblast and renal tumor cells. The GaNAT allowed both cell types to maintain high viabilities of 84.5% and 92.1%, respectively.
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