Dependence of aluminum-doped zinc oxide work function on surface cleaning method as studied by ultraviolet and X-ray photoelectron spectroscopies
Dependence of aluminum-doped zinc oxide work function on surface cleaning method as studied by ultraviolet and X-ray photoelectron spectroscopies
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通过紫外和X射线光电子能谱研究铝掺杂氧化锌功函数对表面清洁方法的依赖性
DOI:
10.1016/j.apsusc.2010.11.084
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发表时间:
2011-02
影响因子:
6.7
通讯作者:
Jinhua Huang
中科院分区:
文献类型:
--
作者:
Weiyan Wang;Kemin Jiang;Xianpeng Zhang;Quanyu Feng;Weijie Song;Ruiqin Tan;Jinhua Huang
The dependence of aluminum-doped zinc oxide (AZO) work function on surface treatment, i.e. acetone solvent cleaning and ultraviolet (UV)-ozone cleaning, was studied by ultraviolet photoelectron spectroscopy and X-ray photoelectron spectroscopy. Comparing different cleaning methods, UV-ozone treated AZO achieved relative higher work function of 4.26eV; whereas acetone solvent treated AZO had relative lower work function of 3.94eV. Two factors, stoichiometry ratio of [OZnAl]/[Zn]+1.5[Al] and carbon contamination on AZO surface, affected the work function and, moreover, the stoichiometry ratio was supposed to be the controlling factor. It was concluded that AZO with high stoichiometry ratio and reduced carbon concentration possessed high work function.
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