Mo-interlayer-mediated thermal conductance at Cu/diamond interface measured by time-domain thermoreflectance

Mo-interlayer-mediated thermal conductance at Cu/diamond interface measured by time-domain thermoreflectance
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通过时域热反射测量铜/金刚石界面的钼层间介导的热导

DOI:
10.1016/j.compositesa.2020.105921
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发表时间:
2020-08
期刊:
Composites Part A: Applied Science and Manufacturing
影响因子:
--
通讯作者:
Zhang Hailong
Zhang Hailong
中科院分区:
其他
文献类型:
--
作者:
Chang Guo;Sun Fangyuan;Wang Luhua;Zhang Yin;Wang Xitao;Wang Jinguo;Kim Moon J.;Zhang Hailong

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Cu/金刚石复合材料的界面热导率(G)通常由复合材料的热导率测量结果推导确定。本文采用磁控溅射法制备了Cu/Mo/金刚石夹层结构,利用时域热反射法直接测量了Cu与金刚石之间的G值,并探讨了夹层对G值的影响。在退火温度下,将中间层调整为在5 nm厚的Mo 2C层上的105 nm厚的Mo层、调整为完整的Mo 2C层、以及调整为在混合的Mo 2C和富勒烯层上的Mo 2C层。Mo中间层的部分转化有利于Cu与金刚石之间的热输运,当Mo层厚度为105 nm,Mo 2C层厚度为5 nm时,最大G值为132 MW m-2K-1.这项研究强调了适当的夹层插入介导的热传输在铜/金刚石界面的热管理应用的重要性。
The interfacial thermal conductance (G) in Cu/diamond composites is generally determined by a deduction from thermal conductivity measurement of the composites. In this article, we prepare a Cu/Mo/diamond sandwich structure by magnetron sputtering to directly measureGbetween Cu and diamond using time-domain thermoreflectance and to probe the effect of the interlayer onG. The interlayer is tuned to a 105 nm-thick Mo layer on a 5 nm-thick Mo2C layer, to a full Mo2C layer, and to a Mo2C layer on a mixed Mo2C and fullerene layer with annealing temperature. The partial conversion of Mo interlayer benefits the thermal transport between Cu and diamond and a maximumGvalue of 132 MW m−2K−1is obtained for the case of 105 nm-thick Mo layer on 5 nm-thick Mo2C layer. This study highlights the importance of appropriate interlayer insertion to mediate thermal transport at Cu/diamond interface for thermal management applications.
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