Investigation of vibration-assisted nano-grinding of gallium nitride via molecular dynamics
Investigation of vibration-assisted nano-grinding of gallium nitride via molecular dynamics
复制标题
通过分子动力学研究氮化镓的振动辅助纳米研磨
DOI：
10.1016/j.mssp.2020.105372
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发表时间：
2021
影响因子：
4.1
通讯作者：
Zhu Fulong
中科院分区：
文献类型：
--
作者：
Huang Yuhua;Wang Miaocao;Xu Yixin;Zhu Fulong
氮化镓(GaN)表面加工的主要目标是获得较高的去除效率和良好的表面质量。因此，我们尝试通过分子动力学模拟来研究一维正弦辅助振动对GaN纳米研磨的影响。通过振动辅助纳米磨削与常规纳米磨削的对比，发现振动辅助纳米磨削的磨削力呈周期性波动，辅助振动改变了金刚石磨料周围的流场。此外，周期为20ps的振动条件下的GaN流动性比其他条件下的好，且亚表面损伤层比常规的纳米磨削更薄。虽然振动辅助纳米磨削的最终表面质量比传统的纳米磨削要差，但事实证明，振动辅助纳米磨削在达到更高的磨削率的同时，也获得了可以接受的质量。
The main goal of the surface machining of gallium nitride (GaN) is to obtain higher removal rate and good surface quality. Thus, we attempted to investigate the impact of the one-dimension sinusoidal assistant vibration on the nano-grinding of GaN by molecular dynamics simulations. By the comparison between the vibration-assisted nano-grinding and the conventional nano-grinding, it is found that the grinding force of the vibration-assisted nano-grinding fluctuated periodically, and the flow field of the vibration-assisted nano-grinding around the diamond abrasive was changed by the assisting vibration. Furthermore, the GaN fluidity of the vibration with period of 20 ps was better than the other condition and had a thinner sub-surface damaged layer than the conventional nano-grinding. Although the final surface quality of the vibration-assisted nano-grinding was worse than the conventional nano-grinding, it was proven that the vibration-assisted nano-grinding achieved higher removal rate and acceptable quality simultaneously by the vibration-assisted nano-grinding.
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发表时间：
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影响因子：
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