Effect of electron injection into phosphorus donors in silicon-on-insulator channel observed by Kelvin probe force microscopy

Effect of electron injection into phosphorus donors in silicon-on-insulator channel observed by Kelvin probe force microscopy
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通过开尔文探针力显微镜观察电子注入绝缘体上硅通道中磷供体的影响

DOI:
10.1063/1.3663624
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发表时间:
2011
影响因子:
4
通讯作者:
M. Tabe
M. Tabe
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
M. Anwar;R. Nowak;D. Moraru;A. Udhiarto;T. Mizuno;R. Jablonski;M. Tabe

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用开尔文探针力显微镜比较研究了13k和300k下单个磷供体势阱中电子注入对绝缘体上硅金属氧化物半导体场效应晶体管的影响。结果,在13k时,发现了局部的单电子填充到磷给体势阱中,反映了单电子通过单个给体的隧道传输,而在300k时,观察到多个磷给体的空间扩展和连续电子填充,反映了漂移扩散输运。
We have comparatively studied the effects of electron injection in individual phosphorus-donor potential wells at 13 K and 300 K by Kelvin probe force microscopy in silicon-on-insulator metal-oxide-semiconductor field-effect-transistors. As a result, at 13 K, localized single-electron filling into the phosphorus-donor potential well is found, reflecting single-electron tunneling transport through individual donors, whereas at 300 K, spatially extended and continuous electron filling over a number of phosphorus-donors is observed, reflecting drift-diffusion transport.
DOI: 10.1103/physrevb.76.075332
发表时间: 2007-08-01
期刊: PHYSICAL REVIEW B
影响因子: 3.7
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发表时间: 2004-03-01
期刊: PHYSICAL REVIEW B
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发表时间: 2008-10-06
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纳米级薄绝缘体上硅场效应晶体管中两个施主之间的单电子转移
DOI: --
发表时间: 2010
期刊: Appl. Phys. Lett.
影响因子: --
作者:
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