The origin and evolution of V-defects in InxAl1−xN epilayers grown by metalorganic chemical vapor deposition
The origin and evolution of V-defects in InxAl1−xN epilayers grown by metalorganic chemical vapor deposition
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金属有机化学气相沉积InxAl1-xN外延层中V缺陷的起源和演化
DOI:
10.1063/1.3272017
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发表时间:
2009-12
影响因子:
4
通讯作者:
Guoyi Zhang
中科院分区:
文献类型:
--
作者:
Zhenlin Miao;Tongjun Yu;Bo Shen;Guoyi Zhang
Near-lattice-matched and highly compressive-strained InxAl1−xN epilayers were grown on GaN templates by metalorganic chemical vapor deposition. The V-defects associated with screw-component threading dislocations (TDs) were found in all the InxAl1−xN laye
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