Enhanced and continuous electrostatic carrier doping on the SrTiO3 surface

Enhanced and continuous electrostatic carrier doping on the SrTiO3 surface
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DOI:
10.1038/srep01721
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发表时间:
2013-04-24
期刊:
影响因子:
4.6
通讯作者:
Panagopoulos, C.
Panagopoulos, C.
中科院分区:
综合性期刊3区
文献类型:
--
作者:
Eyvazov, A. B.;Inoue, I. H.;Stoliar, P.;Rozenberg, M. J.;Panagopoulos, C.

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在相关氧化物的精致表面上存在高电子载流子迁移率的情况下,顺电调节高达 1013 cm−2 的载流子密度,是利用金属-非金属过渡的场效应晶体管 (FET) 实现技术突破的关键。在这里,我们介绍了 Parylene-C/Ta2O5 混合栅极绝缘体,并在单晶 SrTiO3 上制造 FET 器件,单晶 SrTiO3 被认为是氧化物电子学的基础材料。栅极绝缘体积累了高达~1013cm−2 的载流子,而场效应迁移率即使在室温下也保持在 10 cm2/Vs。除了我们器件的卓越性能之外,高载流子密度和高迁移率的增强兼容性揭示了 SrTiO3 表面静电掺杂载流子分布的长期难题的机制。即场域和电流丝的形成和持续演化。
Paraelectrical tuning of a charge carrier density as high as 1013 cm−2 in the presence of a high electronic carrier mobility on the delicate surfaces of correlated oxides, is a key to the technological breakthrough of a field effect transistor (FET) utilising the metal-nonmetal transition. Here we introduce the Parylene-C/Ta2O5 hybrid gate insulator and fabricate FET devices on single-crystalline SrTiO3, which has been regarded as a bedrock material for oxide electronics. The gate insulator accumulates up to ~1013cm−2 carriers, while the field-effect mobility is kept at 10 cm2/Vs even at room temperature. Further to the exceptional performance of our devices, the enhanced compatibility of high carrier density and high mobility revealed the mechanism for the long standing puzzle of the distribution of electrostatically doped carriers on the surface of SrTiO3. Namely, the formation and continuous evolution of field domains and current filaments.
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