A Method to Fabricate Biaxially Textured MgO Buffer Layer for HTS Coated Conductor
A Method to Fabricate Biaxially Textured MgO Buffer Layer for HTS Coated Conductor
复制标题
高温超导涂层导体双向织构氧化镁缓冲层的制备方法
DOI：
10.1109/tasc.2016.2532960
复制
发表时间：
2016-02
影响因子：
1.8
通讯作者：
Han Zhenghe
中科院分区：
文献类型：
--
作者：
Xiao Shaozhu;Feng Feng;Qu Timing;Lu Hongyuan;Zhang Xiangsong;Han Zhenghe
本文采用无辅助离子源的射频磁控溅射系统在非晶Y2 O3/Al 2 O3/Hastelloy叠层衬底上制备了双轴织构MgO薄膜。在沉积过程中，生长的MgO薄膜受到主要由氧原子和负氧离子组成的偏离正常的高能粒子流的轰击，该粒子流来自靶表面。由于这种轰击，MgO获得了双轴织构;因此，这种方法被称为高能粒子自助沉积（EPSAD）。EPSAD-MgO薄膜的织构通过对后沉积的同质外延MgO层的X射线衍射测量进行了评价。观察到MgO（111）的面外取向和三重对称面内取向。当EPSAD-MgO厚度为10 nm左右时，MgO织构最佳。通过控制实验验证了在EPSAD过程中双轴织构的形成，并研究了靶倾斜角和靶基间距对双轴织构的影响。此外，EPSAD-MgO方法的机制进行了比较与倾斜衬底沉积和离子束辅助沉积。提出了一种制备高温超导涂层导体双轴织构MgO缓冲层的新方法。在今后的研究中将进行更多的优化研究。
In this paper, a radio-frequency magnetron sputtering system without any assisting ion source was employed to fabricate biaxially textured MgO films on the substrates of amorphous Y2O3/Al2O3/Hastelloy stacks. During the deposition process, the growing MgO film was bombarded by an off-normal energetic particle flux mainly composed of oxygen atoms and negative oxygen ions, which originated from the target surface. MgO obtained a biaxial texture due to such bombardment; thus, this method is named energetic particle self-assist deposition (EPSAD). The texture of EPSAD-MgO films was evaluated via the X-ray diffraction measurement of the postdeposited homoepitaxial MgO layers. An out-of-plane orientation of MgO(111) and a three-fold symmetric in-plane alignment were observed. The MgO texture was optimal when the EPSAD-MgO thickness was about 10 nm. The formation of biaxial texture during the EPSAD process was verified by a control study, and the influences of targetinclined angle and target-substrate distance were also investigated. Furthermore, the mechanism of the EPSAD-MgO method was compared with those of the inclined substrate deposition and ion beam assisted deposition. This study proposed a new method to fabricate a biaxially textured MgO buffer layer for high temperature superconducting (HTS) coated conductors. More optimization research will be conducted in our future study.
登录
查看更多内容
影响因子：
4
作者：
IIJIMA, Y;TANABE, N;IKENO, Y
通讯作者：
IKENO, Y
影响因子：
3.5
作者：
Mu Qingqing;Liu Linfei;Li Yijie
通讯作者：
Mu Qingqing;Liu Linfei;Li Yijie
DOI：
10.1016/j.nimb.2011.01.026
发表时间：
2012-02
影响因子：
1.3
作者：
J. Groves;R. Hammond;V. Matias;R. Depaula;L. Stan;B. Clemens
通讯作者：
J. Groves;R. Hammond;V. Matias;R. Depaula;L. Stan;B. Clemens
影响因子：
3.2
作者：
Liang Dong;L. Zepeda-Ruiz;D. Srolovitz
通讯作者：
Liang Dong;L. Zepeda-Ruiz;D. Srolovitz
影响因子：
5
作者：
Arendt, PN;Foltyn, SR
通讯作者：
Foltyn, SR