Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region.
Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region.
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DOI：
10.3390/mi7080132
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发表时间：
2016-08-02
期刊：
影响因子：
3.4
通讯作者：
Ye W
中科院分区：
文献类型：
--
作者：
Ramanan A;Teoh YX;Ma W;Ye W
微谐振器是在各种应用中使用的流行结构。它们通常在振动幅度有限的线性区域中工作，从而限制了信噪比。由于分析振动的不稳定性和复杂性，通常避免非线性振动区域，其中振幅和因此信噪比相对较大。在这项工作中，一个非线性的动力学模型与一个阻尼常数从Monte Carlo模拟得到的描述微谐振器的振动响应的非线性区域中工作。为了验证该模型的正确性，设计、制作了一个横向振动梳状驱动谐振器，并在不同的压力和驱动信号下进行了表征。提出了一种简单的非线性区品质因数提取方法。测量的品质因数进行了比较，从非线性模型得到的，得到了很好的协议。
Microresonators are popular structures used in a variety of applications. They generally operate in the linear region where the vibration amplitude is limited, thereby limiting the signal-to-noise ratio. The nonlinear vibration region, where amplitudes and, consequently, the signal-to-noise ratio are relatively large, is generally avoided owing to instabilities and complexities in analysing the vibrations. In this work, a nonlinear dynamic model with a damping constant obtained from Monte Carlo simulation was derived to describe the vibration responses of microresonators operating in the nonlinear region. A laterally oscillating comb-drive driven resonator was designed, fabricated and characterized at various pressures and driving signals to validate the model. A simple method to extract the quality factor of the resonator in the nonlinear region was also proposed. The measured quality factors were compared with those obtained from the nonlinear model and a good agreement was obtained.
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