A Resonant Pressure Sensor Capable of Temperature Compensation with Least Squares Support Vector Machine
A Resonant Pressure Sensor Capable of Temperature Compensation with Least Squares Support Vector Machine
复制标题
最小二乘支持向量机温度补偿谐振压力传感器
DOI：
10.1016/j.proeng.2016.11.501
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Jian Chen
中科院分区：
文献类型：
--
作者：
Lin Zhu;Bo xie;Yonghao Xing;Deyong Chen;Junbo Wang;Yanshuang Wang;Qiuxu Wei;Jian Chen
谐振式压力传感器以其高精度、长期稳定性和准数字输出等优点被广泛应用于压力监测领域，但其关键问题是温度漂移。提出了一种利用最小二乘支持向量机补偿算法进行温度补偿的谐振式压力传感器。双“H”型谐振器被布置在差分输出压力传感器中，其中被测压力被转换为谐振频率输出。与传统的支持向量机和多项式拟合算法相比，基于最小二乘支持向量机的新算法能有效提高所研制微传感器的温度补偿精度。实验结果表明，在整个温压范围内（温度范围为−40 °C ~ 70 °C，压力范围为20 kPa ~ 260 kPa），最大温漂由未补偿的8901.4 Pa减小到补偿后的2.0 Pa，验证了新算法在温度补偿方面的有效性。
Resonant pressure sensors are widely used in pressure monitoring due to high accuracies, long-term stabilities and quasi-digital outputs, which, however, suffers from the key issue of temperature drifts. This paper presents a resonant pressure sensor capable of temperature compensation leveraging the compensation algorithm of least squares support vector machine. Double “H” type resonators were arranged in a differential output pressure sensor where the pressure under measurement was translated to resonant frequency output. In comparison to two conventional algorithms which are support vector machine and polynomial fitting, the new algorithm based on least squares support vector machine can effectively improve the precision of temperature compensation for the developed micro sensors. Experimental results showed that the maximum temperature drift was reduced from 8901.4 Pa (without compensation) to 2.0 Pa (with compensation) in the full temperature and pressure scale (temperature range of −40 °C to 70 °C and pressure range of 20 kPa to 260 kPa), validating the effectiveness of the new algorithm in temperature compensation.
登录
查看更多内容
一种具有自温度补偿功能的谐振压力微传感器
DOI：
10.3390/s150510048
发表时间：
2015-04-29
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Li Y;Wang J;Luo Z;Chen D;Chen J
通讯作者：
Chen J
基于晶圆级 MEMS 真空封装的具有穿玻璃电气互连的高 Q 谐振压力微传感器
DOI：
10.3390/s141224244
发表时间：
2014-12-16
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Luo Z;Chen D;Wang J;Li Y;Chen J
通讯作者：
Chen J
影响因子：
3.1
作者：
Suykens, JAK;Vandewalle, J
通讯作者：
Vandewalle, J
静电驱动电容检测差分横向谐振压力微传感器
影响因子：
1.3
作者：
Jiao, Hailong;Xie, Bo;Chen, Jian
通讯作者：
Chen, Jian