SU-8 Guiding Layer for Love Wave Devices.
SU-8 Guiding Layer for Love Wave Devices.
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DOI：
10.3390/s71102539
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发表时间：
2007-11-01
期刊：
影响因子：
--
通讯作者：
Newton MI
中科院分区：
文献类型：
--
作者：
Roach P;Atherton S;Doy N;McHale G;Newton MI
SU-8是一种技术上重要的光刻胶，广泛用于微流体和MEMS的制造，允许生产高纵横比结构。在这项工作中，我们报告使用SU-8作为勒夫波传感器的引导层，它允许在制造过程中将引导层与流动池集成的可能性。在ST切割石英衬底上制造具有单-单指设计的器件，使得在97.4MHz处激发表面掠体波（SSBW）。SU-8聚合物层依次建立了旋涂和光谱记录在每个阶段，显示频率随引导层厚度的增加而降低。在第一Love波模式下，研究了插入损耗和频率随波导层厚度的变化关系。通过沉积多层金层，研究了所得乐甫波器件的质量负载灵敏度。还证明了使用这些装置的液体感测;使用水-甘油混合物来证明密度-粘度的感测，并且还使用白蛋白和纤维蛋白原作为模型蛋白质来评估蛋白质的物理吸附和去除。
SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer with flow cell during fabrication. Devices were fabricated on ST-cut quartz substrates with a single-single finger design such that a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layers were successively built up by spin coating and spectra recorded at each stage; showing a frequency decrease with increasing guiding layer thickness. The insertion loss and frequency dependence as a function of guiding layer thickness was investigated over the first Love wave mode. Mass loading sensitivity of the resultant Love wave devices was investigated by deposition of multiple gold layers. Liquid sensing using these devices was also demonstrated; water-glycerol mixtures were used to demonstrate sensing of density-viscosity and the physical adsorption and removal of protein was also assessed using albumin and fibrinogen as model proteins.
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影响因子：
2.4
作者：
Turton, A;Bhattacharyya, D;Wood, D
通讯作者：
Wood, D
影响因子：
8.4
作者：
Razan, Florence;Rebiere, Dominique;Conedera, Veronique
通讯作者：
Conedera, Veronique
影响因子：
4.6
作者：
Du, J;Harding, GL
通讯作者：
Harding, GL
影响因子：
4.6
作者：
Du, J;Harding, GL;Lake, M
通讯作者：
Lake, M
DOI：
10.1088/0960-1317/14/10/013
发表时间：
2004-10-01
影响因子：
2.3
作者：
Shirtcliffe, NJ;Aqil, S;Roach, P
通讯作者：
Roach, P