Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering
Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering
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氮气流量对面靶溅射MoNx涂层结构和性能的影响
DOI：
10.1016/j.jallcom.2017.01.077
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发表时间：
2017-04
影响因子：
6.2
通讯作者：
Jiang Bailing
中科院分区：
文献类型：
--
作者：
Wang Tao;Zhang Guojun;Ren Shuai;Jiang Bailing
Molybdenum nitride (MoNx) coatings with different nitrogen content were deposited by reactively sputtering molybdenum metal target with various N2flow rate. The structure of the coatings were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray photoelectron spectrometry (XPS). The mechanical and tribological properties of the coating were evaluated by nano-indentation and ball-on-disc wear tests, respectively. The structural analysis showed that these coatings changed from bcc α-Mo phase to fcc γ-Mo2N phase, and then to fcc B1-MoN with the increase in N2flow rate. As the phase structure changed from α-Mo to γ-Mo2N, the MoNxcoatings exhibit finer grain sizes and denser crystal structure, which have dramatic contribution on hardness enhancement. The γ-Mo2N coating exhibits the highest hardness with the value of 32.5 GPa. As phase structure further changed to B1-MoN coating, a slight decline of hardness can be observed. The γ-Mo2N structured coatings exhibited lower COF than that of mainly Mo structured MoNxcoating or B1-MoN coating.
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