Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent

Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent
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射频驱动微气压等离子体射流及其流出物的空间分辨模拟

DOI:
10.1088/0022-3727/44/28/285206
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发表时间:
2011
期刊:
Journal of Physics D: Applied Physics
影响因子:
--
通讯作者:
T. Mussenbrock
T. Mussenbrock
中科院分区:
--
文献类型:
--
作者:
T. Hemke;A. Wollny;M. Gebhardt;R.P. Brinkmann;T. Mussenbrock

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射频驱动的等离子体射流经常被用作有效的等离子体源,用于在大气压下进行表面改性和其他工艺。射频驱动的微大气压等离子体射流(μAPPJ)是该概念的一个特殊变体,其几何形状允许直接光学访问。本文通过数值模拟研究了μAPPJ在氦氧混合物中工作的特性及其与氦环境的相互作用。电子的密度和温度,以及所有反应物质的浓度都在射流本身和流出物中进行了研究。结果发现,出水基本上不含电荷载体,但含有大量活性氧(O、O 3和O 2 (1 Δ))。
Radio-frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro-atmospheric pressure plasma jet (μAPPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the μAPPJ operated with a helium–oxygen mixture and its interaction with a helium environment are studied by numerical simulation. The density and temperature of the electrons, as well as the concentration of all reactive species are studied both in the jet itself and in its effluent. It is found that the effluent is essentially free of charge carriers but contains a substantial amount of activated oxygen (O, O 3 and O 2 (1 Δ)).
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