Fluorine plasma treatment induced deep level traps and their effect on current transportation in Al0.83In0.17N/AlN/GaN Schottky barrier diodes

Fluorine plasma treatment induced deep level traps and their effect on current transportation in Al0.83In0.17N/AlN/GaN Schottky barrier diodes
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氟等离子体处理引起的深能级陷阱及其对 Al0.83In0.17N/AlN/GaN 肖特基势垒二极管电流传输的影响

DOI:
10.1088/0022-3727/49/30/305103
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发表时间:
2016-07
期刊:
Journal of Physics D: Applied Physics
影响因子:
--
通讯作者:
Zhang Guoyi
Zhang Guoyi
中科院分区:
其他
文献类型:
--
作者:
Xiang Yong;Yu Tongjun;Ji Cheng;Cheng Yutian;Yang Xuelin;Kang Xiangning;Shen Bo;Zhang Guoyi

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采用温度依赖的电流-电压(I-V)和深能级瞬态电压谱研究了氟等离子体处理(F处理)和未处理的Al 0.83 In 0.17 N/AlN/GaN肖特基势垒二极管(SBD)的深能级陷阱和电学特性
The deep level traps and the electrical properties of fluorine plasma treated (F-treated) and non-treated Al0.83In0.17N/AlN/GaN Schottky barrier diodes (SBDs) were investigated by the temperature-dependent current–voltage (I–V) and deep level transient sp
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