Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings
Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings
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高温退火对类金刚石碳和TiAlSiCN纳米复合涂层结构、硬度和摩擦学性能的影响
DOI：
10.1016/j.apsusc.2011.09.072
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发表时间：
2011-11
影响因子：
6.7
通讯作者：
Huang, L.
中科院分区：
文献类型：
--
作者：
Wang, X. F.;Lu, Y.;Xie, Z. W.;Yan, J. C.;Wang, L. P.;Huang, L.
合成了类金刚石（DLC）和TiAlSiCN纳米复合涂层，并在真空环境下进行了不同温度的退火。采用x射线衍射、x射线光电子能谱（XPS）、透射电子显微镜（TEM）、拉曼光谱（Raman spectroscopy）、纳米压痕和摩擦试验对沉积和退火后的DLC-TiAlSiCN纳米复合涂层的显微组织、硬度和摩擦学性能进行了表征。TEM结果表明，沉积的DLC - tialsicn涂层具有独特的纳米复合结构，由tialsicn纳米晶嵌套在由a- si3n4、a- sic、a- cn和DLC组成的非晶基体中，且在800℃退火后结构变化不大。然而，XPS和Raman结果表明，DLC相在退火过程中发生了明显的石墨化，并随着退火温度的升高而恶化。由于石墨化，DLC-TiAlSiCN涂层在800℃退火后的硬度从45 gpa下降到36GPa。此外，800℃退火后的DLC-TiAlSiCN涂层具有与沉积涂层相似的摩擦系数。
Diamond-like carbon (DLC) and TiAlSiCN nanocomposite coatings were synthesized and annealed at different temperatures in a vacuum environment. The microstructure, hardness and tribological properties of as-deposited and annealed DLC–TiAlSiCN nanocomposite coatings were characterized by X-ray diffraction, X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), Raman spectroscopy, nano-indentation and friction tests. The TEM results reveal that the as-deposited DLC–TiAlSiCN coating has a unique nanocomposite structure consisting of TiCN nanocrystals embedded in an amorphous matrix consisting of a-Si3N4, a-SiC, a-CN and DLC, and the structure changed little after annealing at 800°C. However, XPS and Raman results show that an obvious graphitization of the DLC phase occurred during the annealing process and it worsened with annealing temperature. Because of the graphitization, the hardness of the DLC–TiAlSiCN coating after annealing at 800°C decreased from 45 to 36GPa. In addition, the DLC–TiAlSiCN coating after annealing at 800°C has a similar friction coefficient to the as-deposited coating.
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影响因子：
4.1
作者：
B. Oral;R. Hauert;U. Müller;K. Ernst
通讯作者：
B. Oral;R. Hauert;U. Müller;K. Ernst
影响因子：
4
作者：
M. Lejeune;M. Benlahsen;R. Bouzerar
通讯作者：
M. Lejeune;M. Benlahsen;R. Bouzerar
影响因子：
2.1
作者：
Lin, Yu-Hung;Lin, Hong-Da;Shih, Han C.
通讯作者：
Shih, Han C.
影响因子：
5.4
作者：
S. Vepřek;A. Niederhofer;K. Moto;T. Bolom;H.-D. Männling;P. Nesládek;G. Dollinger;A. Bergmaier
通讯作者：
S. Vepřek;A. Niederhofer;K. Moto;T. Bolom;H.-D. Männling;P. Nesládek;G. Dollinger;A. Bergmaier
影响因子：
2.1
作者：
Hoerling, A.;Sjolen, J.;Hultman, L.
通讯作者：
Hultman, L.