Design of a novel MEMS gyroscope array.
Design of a novel MEMS gyroscope array.
复制标题
DOI：
10.3390/s130201651
复制
发表时间：
2013-01-28
期刊：
影响因子：
--
通讯作者：
Sun F
中科院分区：
文献类型：
--
作者：
Wang W;Lv X;Sun F
本文报道了一种新型的四自由度微机电系统振动陀螺仪。利用该陀螺仪单元设计了微机电系统陀螺仪阵列。在所提出的四自由度MEMS振动陀螺仪的设计中，驱动模式的元素设置在整个陀螺仪架构内部，而感知模式的元素设置在驱动模式周围，从而可以将多个陀螺仪单元通过所有单元的感知模式组合成一个陀螺仪阵列。在陀螺仪单元的驱动模式和感知模式中使用了完整的2自由度振动结构，从而提供了所需的带宽和固有的鲁棒性。陀螺仪阵列利用独特的检测质量将多个陀螺仪单元组合在一起，增加了传感模式的增益，提高了系统的灵敏度。仿真结果表明，与单个陀螺仪单元相比，陀螺仪阵列（n = 6）的增益提高了约8 dB；还提供了在感测模式下100hz和在驱动模式下190hz的3db带宽。两种模式的带宽高度匹配，为整个系统提供了100hz的带宽，可以满足实际应用的要求。
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications.
登录
查看更多内容
影响因子：
4.6
作者：
Alper, Said Emre;Azgin, Kivanc;Akin, Tayfun
通讯作者：
Akin, Tayfun
影响因子：
2.7
作者：
Acar, C;Shkel, AM
通讯作者：
Shkel, AM
影响因子：
4.3
作者：
Wang, Wei;Lv, Xiaoyong;Sun, Feng
通讯作者：
Sun, Feng
影响因子：
4.6
作者：
Trusov, Alexander A.;Schofield, Adam R.;Shkel, Andrei M.
通讯作者：
Shkel, Andrei M.
影响因子：
4.6
作者：
Wang, Ren;Cheng, Peng;Hao, Zhili
通讯作者：
Hao, Zhili