A nano-imprint method analysis of the optical subsurface quality processed by hydrodynamic effect polishing
A nano-imprint method analysis of the optical subsurface quality processed by hydrodynamic effect polishing
复制标题
纳米压印法分析流体动力效应抛光加工的光学次表面质量
DOI：
10.1016/j.ijleo.2018.06.032
复制
发表时间：
2018-10
期刊：
影响因子：
3.1
通讯作者：
Shengyi Li
中科院分区：
文献类型：
--
作者：
Wenqiang Peng;Xiong Deng;Zhengbin Luo;Shengyi Li
流体动力效应抛光(HEP)是通过化学碰撞反应将材料在弹性区域去除，可以有效地去除表面/亚表面损伤，获得超光滑表面。然而，亚表面损伤包含划痕和加工残余应力，隐藏在表面之下，不易检测。亚表面性能，如硬度、弹性模数等与亚表面损伤有直接关系。为此，提出了用纳米压痕法分析光学亚表面质量来评价流体动力效应抛光工艺效果。对常规垫片预抛光的石英玻璃进行了抛光实验。利用原子力显微镜和Zygo白光干涉仪对抛光前后的表面进行了观察。结果表明，HEP工艺完全消除了表面划痕和凸起结构等表面损伤，表面粗糙度均方根值降至接近0.3 nm。在不同载荷和不同压印深度下，对加工和未加工区域进行纳米压印，以评价其亚表面损伤程度。印迹结果表明，处理后的表面变得柔软且容易被压印，而未处理的表面变得坚硬。当压痕深度超过200 nm时，加工表面和未加工表面呈现相同的压痕深度。分析表明，在脆性或塑性去除材料的传统加工过程中，表面在亚表面损伤残余应力的作用下变硬。在HEP中通过化学撞击反应以弹性方式去除材料，可以有效地去除表面/亚表面损伤。结果表明，HEP处理后的表面性能与块体材料非常接近。
Hydrodynamic effect polishing (HEP), in which the material is removed in elastic region by chemical impact reaction, can effectively remove the surface/subsurface damage to get an ultrasmooth surface. However subsurface damage contains scratches and machining residual stress are hidden below the surface and can’t be easily detected. The subsurface/surface properties such as hardness and elastic modulus have direct relationship with the subsurface damage. Therefore, a nano-imprint method analysis of the optical subsurface quality was presented to evaluate the hydrodynamic effect polishing process effect. Polishing experiment was conducted on a conventional pad pre-polished silica glass. The surface before and after polishing process was firstly observed by atomic force microscope and ZYGO white-light interferometer. The observation shows the surface damage such as the scratches and bump structures are completely removed by HEP process, and the surface roughness rms value decreased to near 0.3 nm. To evaluate the subsurface damage, nano-imprint was conducted on the processed and unprocessed area under different load with different impressed depth. The imprint results show the processed surface become soft and easily be impressed, while the unprocessed surface becomes hard. The processed and unprocessed surface shows the same impress depth when impressed depth exceeded 200 nm. Analysis shows the surface becomes hard under the effect of the residual stress in subsurface damage which is generated in the traditional machining process with material removal in brittle or plastic mode. Material is removed in elastic mode by chemical impact reaction in HEP, and the surface/subsurface damage can be effectively removed. It demonstrates that HEP processed surface properties are much close to the bulk material.
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影响因子：
1.9
作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
通讯作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
影响因子：
3.8
作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
通讯作者：
Wen-qiang Peng;Chao-liang Guan;Shengyi Li
DOI：
--
发表时间：
1999-04
期刊：
--
影响因子：
--
作者：
J. Carr;E. Fearon;I. Hutcheon;L. Summers
通讯作者：
J. Carr;E. Fearon;I. Hutcheon;L. Summers
DOI：
--
发表时间：
2012
期刊：
Journal of East China University of Science and Technology
影响因子：
--
作者：
Wang Qing-ming
通讯作者：
Wang Qing-ming
DOI：
10.1117/12.511489
发表时间：
2004-01
期刊：
--
影响因子：
--
作者：
U. Dinger;G. Seitz;Stefan Schulte;F. Eisert;C. Muenster;S. Burkart;S. Stacklies;Christian Bustaus;H. Hoefer;Maximilian Mayer;Bernhard Fellner;Oliver Hocky;Markus Rupp;Klaus Riedelsheimer;Peter Kuerz
通讯作者：
U. Dinger;G. Seitz;Stefan Schulte;F. Eisert;C. Muenster;S. Burkart;S. Stacklies;Christian Bustaus;H. Hoefer;Maximilian Mayer;Bernhard Fellner;Oliver Hocky;Markus Rupp;Klaus Riedelsheimer;Peter Kuerz