Fully differential electro-mechanical phase locked loop sensor circuit
Fully differential electro-mechanical phase locked loop sensor circuit
复制标题
全差分机电锁相环传感器电路
DOI：
10.1016/j.sna.2013.01.053
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
Rudolf R
中科院分区：
文献类型：
--
作者：
Rudolf R
力反馈系统将微机械传感元件嵌入到一个闭环中，具有线性好、动态范围大、参数灵敏度低等优点，是实现高性能MEMS(微机电系统)传感器的常用技术。机电Sigma-Delta调制器(EM-ΣΔ)就是为此而提出的，高阶环路的信噪比(SNR)已被证明超过100d B。众所周知，在高阶EMΣΔS中实现稳定性是一项具有挑战性的任务，在实践中，当输入信号较大时，或由于所实现电路中的非理想效应，可能会失去稳定性。在这项工作中，我们提出了一种新的差频域技术用于微机械传感器的闭环控制。这种方法被称为机电锁相环(EMPLL)，它使用差动机电锁相环来控制和测量微机械传感器的挠度。我们相信，与EMΣΔS相比，EMPLL在高性能微机械传感器方面具有显著优势。初步研究表明，这种新的方法将在信噪比、参数灵敏度和输入信号范围方面带来显著的好处。
Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realize high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical sigma delta modulators (EMΣΔ) have been proposed for this reason and high order loops have been shown to enjoy a good signal to noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMΣΔs is a challenging task and in practice stability can be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel differential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the deflection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMΣΔs for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in signal to noise ratio, parameter sensitivity, and input signal range.
一种MEMS振动陀螺仪低噪声接口电路
DOI：
10.1109/icsict.2010.5667561
发表时间：
2010
期刊：
2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
影响因子：
--
作者：
Ran Fang;Wengao Lu;Chang Liu;Zhongjian Chen;Yuan Ju;Guannan Wang;L. Ji;Dunshan Yu
通讯作者：
Dunshan Yu
随机振动下微机械谐振器的主动静电补偿
影响因子：
2.7
作者：
S. Yoneoka;J. Salvia;G. Bahl;R. Melamud;S. Chandorkar;T. Kenny
通讯作者：
T. Kenny
采用 PLL 伺服技术的集成硅电容式加速度计
影响因子：
4.6
作者：
Y. Matsumoto;M. Esashi
通讯作者：
M. Esashi