Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error.
Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error.
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具有表面加工误差的静电 MEMS 谐振器的静态和动态机械行为
DOI：
10.3390/mi9010034
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发表时间：
2018-01-17
期刊：
影响因子：
3.4
通讯作者：
Hao S
中科院分区：
文献类型：
--
作者：
Feng J;Liu C;Zhang W;Hao S
基于表面加工技术开发的微机电系统（MEMS）谐振器通常由于蚀刻过多或蚀刻不足而导致截面形状发生变化。本文提出了一个截面参数来描述上下截面的微束变化。对截面变化对力学性能的影响进行了解析研究，并通过数值和有限元解进行了验证。研究了一种由一侧电极驱动的双钳位微束谐振器。在不忽略中性面拉伸和静电非线性影响的情况下，导出了高阶模型。利用伽辽金方法和牛顿-柯特方法降低了模型的复杂度和阶数。首先，研究了微梁形状和间隙变化对静拉入的影响。然后，对系统进行了动态分析。采用多尺度法（MMS）确定了系统对小振幅振动的响应。讨论了微梁形状与频率响应的关系。结果表明，截面和间隙距离的变化会使振动变软、变硬等。当振动幅值较大时，MMS的频率响应软化效果减弱。如果非线性一开始表现为硬化型行为，随着幅值的增加，频率响应将从硬化型行为转变为软化型行为。研究了大振幅井内运动，以研究硬化和软化行为之间的转变。最后利用COMSOL软件（COMSOL Inc., Stockholm, Sweden）进行有限元分析，对理论结果进行验证，两者在稳定区非常接近。
The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and verified through numerical and finite element solutions. A doubly-clamped microbeam-based resonator, which is actuated by an electrode on one side, is investigated. The higher-order model is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity. Further, the Galerkin method and Newton–Cotes method are used to reduce the complexity and order of the derived model. First of all, the influence of microbeam shape and gap variation on the static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method of multiple scales (MMS) is applied to determine the response of the system for small amplitude vibrations. The relationship between the microbeam shape and the frequency response is discussed. Results show that the change of section and gap distance can make the vibration soften, harden, and so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with the increase of the amplitude, the frequency response will shift from hardening to softening behavior. The large amplitude in-well motions are studied to investigate the transitions between hardening and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc., Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close to each other in the stable region.
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影响因子：
3.4
作者：
Hafiz MAA;Kosuru L;Ramini A;Chappanda KN;Younis MI
通讯作者：
Younis MI
DOI：
10.1088/0960-1317/18/5/055026
发表时间：
2008-05-01
影响因子：
2.3
作者：
Krylov, Slava;Ilic, Bojan R.;Craighead, Harold
通讯作者：
Craighead, Harold
DOI：
10.1016/j.ijengsci.2014.10.004
发表时间：
2015-01-01
影响因子：
6.6
作者：
Ghayesh, Mergen H.;Farokhi, Hamed
通讯作者：
Farokhi, Hamed
DOI：
10.1007/s00542-004-0411-6
发表时间：
2005-02-01
影响因子：
2.1
作者：
Lin, WH;Zhao, YP
通讯作者：
Zhao, YP
DOI：
10.1088/0960-1317/16/11/028
发表时间：
2006-11-01
影响因子：
2.3
作者：
Najar, F.;Choura, S.;Nayfeh, A.
通讯作者：
Nayfeh, A.